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Flexible Nanowiring Of Metal On Nonplanar Substrates By Femtosecond-laser-induced Electroless Plating.

B. Xu, Hong Xia, Li-Gang Niu, Y. Zhang, K. Sun, Q. Chen, Y. Xu, Zhi-Qiu Lv, Z. Li, H. Misawa, H. Sun
Published 2010 · Materials Science, Medicine

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However,thelithographicrouteshowsstrongdemandsonthesurfaceflatnessofeachlayerin the multilevel chip architectures. To meet the processingnature of lithography, a global planarization of interlayermetals by chemical–mechanical polishing is therefore neededto reduce the interval between the metal layer and thephotomask, and to guarantee exposure resolution when wiresreachthesub-300nmscale.Two-photonabsorption(TPA)hasalso been tried for the fabrication of metal microstructures byusing suitable salt solutions as the metal source and photo-sensitive molecules as the photoinitiator.
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