Online citations, reference lists, and bibliographies.
← Back to Search

Some Elementary Connections Between Curvature And Mismatch Strain In Compositionally Graded Thin Films

L. Freund
Published 1996 · Materials Science

Save to my Library
Download PDF
Analyze on Scholarcy
Share
A thin film structure with through-the-thickness variation of properties and/or mismatch strain is considered. The relationship of the overall curvature of the film to the variation of properties and mismatch strain is reviewed. It is shown that, if the material properties are known, the mismatch strain distribution in the film can be expressed in terms of the dependence of curvature on film thickness. In addition, the case of film growth under conditions for which the mismatch strain of deposited material depends on the local strain conditions of the growth surface is considered. By means of an illustration, it is shown that the final state of strain within a free film following growth depends on the constraint conditions that were imposed on the film during its growth.
This paper references



This paper is referenced by
10.1177/0731684406059787
Thermo-elastic Stresses in Composite Beams with Functionally Graded Layer
K. Nirmala (2006)
10.1557/PROC-657-EE5.14
Curvature Model for an Ion-Machined Free-Standing Thin Film MEMS Device
H. Johnson (2000)
10.1080/10584580590965005
DIELECTRIC PERMITTIVITY AND PYROELECTRIC RESPONSE OF COMPOSITIONALLY GRADED FERROELECTRICS
S. Zhong (2005)
10.1007/978-3-540-29857-1_54
Thermo- and Electromechanical Behavior of Thin-Film Micro and Nanostructures
M. Dunn (2007)
10.1007/0-387-25786-1_33
Techniques in Residual Stress Measurement for MEMS and Their Applications
K. Chen (2006)
10.1016/0022-5096(96)84548-0
Small and large deformation of thick and thin-film multi-layers: Effects of layer geometry, plasticity and compositional gradients
M. Finot (1996)
10.1063/1.4959073
Curvature and bow of bulk GaN substrates
Humberto M. Foronda (2016)
10.1016/S0022-5096(99)00070-8
Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
L. Freund (2000)
10.1115/IMECE2005-81383
An Analysis of Elastic Deformation Induced by Gradient Residual Stresses in Multilayered MEMS Structures
S. Huang (2005)
10.1109/ITHERM.2010.5501268
Modeling of multi-temperature-cycle wafer curvature
J. Zarbakhsh (2010)
10.1088/0960-1317/25/7/075011
Parametric study of electroplating conditions on mismatch strain of thin film for self-positioning of MEMS
Sang-Hyun Kim (2015)
10.1016/J.JCRYSGRO.2003.11.020
In situ stress measurements during the MOCVD growth of AlN buffer layers on (1 1 1) Si substrates
S. Raghavan (2004)
10.1109/ECTC.2002.1008137
PWB stability analysis under in-plane forces
Xiao-ling He (2002)
10.1007/978-0-387-68319-5_7
Functionally Graded Polar Heterostuctures: New Materials for Multifunctional Devices
D. Jena (2008)
10.1002/9781118407820.CH17
High Temperature Forming of Ceramic Shapes Without Applying External Pressure
S. Lombardo (2012)
10.1063/1.3687370
Experimental observation and analytical model of the stress gradient inversion in 3C-SiC layers on silicon
M. Zielinski (2012)
10.4071/HITEC-JZARBAKHSH-TP16
Thermomechanical Stresses in Copper Films at Elevated Temperature
M. Lederer (2010)
Thin Film Materials: Stress, Defect Formation and Surface Evolution
L. Freund (2004)
10.1016/J.IJMECSCI.2009.09.009
The influence of dislocation distribution density on curvature and interface stress in epitaxial thin films on a flexible substrate
I. Dobovšek (2010)
10.1063/1.4907572
Modeling of thermal stresses in elastic multilayer coating systems
C. Gao (2015)
10.1016/J.SNA.2010.06.002
A multilayer bending model for conducting polymer actuators
P. Du (2010)
10.1016/J.NIMB.2005.01.008
Tailoring of silicon crystals for relativistic-particle channeling
V. Guidi (2005)
10.1111/J.1551-2916.2006.01131.X
Effect of Processing on the Microstructure and Induced‐Strain Mismatch in Magnesia–Alumina‐Layered Composites
Chang-Soo Kim (2006)
Etude de la croisssance CVD des films minces de 3C-SiC et élaboration du cantilever AFM en 3C-SiC avec pointe Si intégrée
Sai Jiao (2012)
10.1063/1.2012526
Magnetization-graded ferromagnets: The magnetic analogs of semiconductor junction elements
J. Mantese (2005)
10.1007/S12206-008-0806-X
Intrinsic stress, mismatch strain, and self-assembly during deposition of thin films subjected to an externally applied force
S. Kim (2008)
10.1143/JJAP.49.010214
Mismatch Strain and Residual Stress of Freestanding Electroplated Ni Thin Film
S. Kim (2010)
10.1063/1.1866505
Effective pyroelectric response of compositionally graded ferroelectric materials
S. Zhong (2005)
10.1016/J.TSF.2010.03.073
Aqueous lateral epitaxy overgrowth of ZnO on (0001 ) GaN at 90 °C Part II: Stress determination
S. P. Fillery (2010)
10.1007/S11666-997-0065-X
Residual stresses in thick, nonhomogeneous coatings
F. Kroupa (1997)
10.1557/PROC-653-Z10.3
Calculation of Intrinsic Stresses and Elastic Moduli in Nonhomogeneous Thin Films
Pedro C. Andia (2000)
10.1111/J.1551-2916.2005.00410.X
Strain-Induced Deformation in Magnesia–Alumina Layered Composites
Chang-Soo Kim (2005)
See more
Semantic Scholar Logo Some data provided by SemanticScholar