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Nanostructuring Of Alumina Optical Waveguides By Hot Water Treatment For Tuning Sensor Output

M. Aslan
Published 2012 · Materials Science

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Abstract A study of the nanostructuring of alumina integrated optical waveguides by means of hot water treatment to tune their outputs, namely, total internal reflection and scattering, is presented. Homogeneous alumina thin films fabricated by atomic layer deposition were exposed to hot water to form surface nano-pillars of various heights and densities. The 135-, 232- and 307-nm thick alumina films were immersed in hot water at 50, 60, and 80 °C for 2, 5, 10, 15, 20 and 30 min. Topology measurements of the nanostructured integrated optical waveguides (n-IOWs) were made using an atomic force microscope and a scanning electron microscope. Optical transmission and coupling measurements for n-IOWs were taken. Average pillar height and density, controlled by adjusting the water temperature and exposure time, act to tune the scattered and guided fractions of the coupled light. Well controlled fabrication of nanopillars (up to 110-nm-tall) as well as fine tuning of the scattered component of sensor output is possible. Fabricated n-IOW sensors with dual outputs, total internal reflection and scattering, could be quite useful for the enhanced sensing of surface-adsorbed molecular species.
This paper references
10.1007/BF02692538
Designing nanostructures for sensor applications
Y. Zhao (2006)
10.1063/1.1613366
Nanoscroll formation from strained layer heterostructures
M. Grundmann (2003)
10.1016/0040-6090(93)90599-K
The effect of surface aluminum oxide films on thermally induced hillock formation
C. Chang (1993)
10.1007/S10971-009-1952-Z
Sensing abilities of materials prepared by sol–gel technology
A. Lukowiak (2009)
10.1016/S0167-9317(03)00395-2
Small-scale plasticity in thin Cu and Al films
G. Dehm (2003)
10.1063/1.1597987
Noise and photoconductive gain in InAs quantum-dot infrared photodetectors
Z. Ye (2003)
10.1016/J.TSF.2007.05.089
Anti-reflective properties of nano-structured alumina thin films on poly(methyl methacrylate) substrates by the sol–gel process with hot water treatment
Kiyoharu Tadanaga (2008)
10.1116/1.582502
n‐i‐p‐i doping superlattices—metastable semiconductors with tunable properties
G. Doehler (1983)
10.1147/rd.373.0319
X-ray lithography from 500 to 30 nm: X-ray nanolithography
H. Smith (1993)
10.1364/OL.19.000710
Optical waveguides fabricated in anodic alumina films.
M. Saito (1994)
10.1002/ANIE.200301652
Atomic layer deposition chemistry: recent developments and future challenges.
M. Leskelä (2003)
10.1116/1.590052
A review of ion projection lithography
J. Melngailis (1998)
10.1116/1.586346
Nanolithography and its prospects as a manufacturing technology
R. W. Pease (1992)
10.1016/0040-6090(95)06941-0
A comparative study of Hillock formation in aluminum films
B.Cao Martin (1995)
10.1016/0030-4018(73)90152-1
A high efficiency thin grating coupler for integrated optics
D. G. Dalgoutte (1973)
10.1007/BF00882729
Analysis and design of grating couplers
T. Tamir (1977)
10.1021/ac8015642
Optical waveguide sensor based on a porous anodic alumina/aluminum multilayer film.
A. Yamaguchi (2009)
10.2147/NANO.2006.1.4.483
Micro- and nanofabrication methods in nanotechnological medical and pharmaceutical devices
T. Betancourt (2006)
10.1016/J.MSEB.2009.02.011
On the implementation of nano-structured materials in surface plasmon resonance sensors
A. Koutsioubas (2009)
10.1016/J.TSF.2006.11.009
Antireflective properties of flowerlike alumina thin films on soda–lime silica glass substrates prepared by the sol–gel method with hot water treatment
Naoko Yamaguchi (2007)
10.1111/J.1151-2916.1997.TB02943.X
Super-water-repellent AlO coating films with high transparency
Kiyoharu Tadanaga (1997)
10.1038/nmat2162
Biosensing with plasmonic nanosensors.
Jeffrey N. Anker (2008)
10.1088/0022-3735/16/12/023
Determination of the thickness and optical constants of amorphous silicon
R. Swanepoel (1983)
10.1002/ADMA.200501353
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication
Ming-huang Huang (2005)
10.1557/MRS2009.51
Nanomechanical Architectures-Mechanics-Driven Fabrication Based on Crystalline Membranes
F. Liu (2009)
10.1016/J.TSF.2010.03.011
Low-Loss Optical Waveguides for the Near Ultra-Violet and Visible Spectral Regions with Al(2)O(3) Thin Films from Atomic Layer Deposition.
M. Aslan (2010)
10.1063/1.2207044
Sculptured Thin Films: Nanoengineered Morphology and Optics
D. K. Paul (2005)



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