Online citations, reference lists, and bibliographies.
← Back to Search

Silicon Tube Structures For A Fluid-density Sensor

P. Enoksson, G. Stemme, E. Stemme
Published 1996 · Engineering

Cite This
Download PDF
Analyze on Scholarcy
Share
Abstract The influence on sensor performance of the dimensions of the first resonant silicon tube structure for measuring liquid fluid density is tested with regard to density sensitivity, vibration mode, resonance frequency and Q -factor for four different double-loop designs. A new thin-walled structure with improved sensitivity is presented. The sensor consists of a tube system which oscillates in mechanical resonance. The structures are planar double-loop tubes of single-crystalline silicon fabricated using anisotropic silicon etching and silicon fusion bonding. Tube structures with wall thicknesses of 100 and 50 μm have been examined. They have fluid-density sensitivities of −230 and −320 ppm (kg m −3 ) −1 , respectively.
This paper references



This paper is referenced by
10.1017/S0022112009993521
Energy dissipation in microfluidic beam resonators.
J. Sader (2010)
10.1002/MREN.200900024
A Critical Overview of Sensors for Monitoring Polymerizations
G. E. Fonseca (2009)
10.1109/JMEMS.2003.820270
Planar CMOS compatible process for the fabrication of buried microchannels in silicon, using porous-silicon technology
G. Kaltsas (2003)
10.1109/ICECE.2010.727
Research on Web-Based Typical Process Management
Yang Zhi-gang (2010)
10.1007/s00366-019-00790-5
Wave dispersion characteristics of fluid-conveying magneto-electro-elastic nanotubes
M. Dehghan (2019)
10.1038/nature05741
Weighing of biomolecules, single cells and single nanoparticles in fluid
T. Burg (2007)
10.1063/1.1611625
Suspended microchannel resonators for biomolecular detection
T. Burg (2003)
10.1007/S10404-016-1706-5
Vibration and instability of fluid-conveyed smart micro-tubes based on magneto-electro-elasticity beam model
A. Amiri (2016)
10.1088/0960-1317/17/8/032
A silicon straight tube fluid density sensor
M. Najmzadeh (2007)
10.1109/MEMSYS.1997.581826
A CMOS-compatible device for fluid density measurements
D. Westberg (1997)
10.4028/www.scientific.net/AST.100.134
Fluidic Physical Sensors and Sensor Systems
B. Jakoby (2016)
A STRAIGHT SILICON TUBE AS A MICROFLUIDIC DENSITY SENSOR
M. Najmzadeh (2007)
Low pressure encapsulation techniques for silicon resonators
Thierry Corman (1998)
10.1038/srep33799
Pulled microcapillary tube resonators with electrical readout for mass sensing applications
Donghyuk Lee (2016)
10.1109/SENSOR.2005.1497291
Generic fabrication technology for transparent and suspended microfluidic and nanofluidic channels
T.S. Hug (2005)
10.5829/ije.2017.30.12c.13
Stabilization of Electrostatically Actuated Micro-pipe Conveying Fluid Using Parametric Excitation
B. Abbasnejad (2017)
Vacuum-Sealed and Gas-Filled Micromachined Devices
T. Corman (1999)
10.1063/1.3475151
Ultimate and practical limits of fluid-based mass detection with suspended microchannel resonators
J. Arlett (2010)
Optical fibre sensor for fuel cell and other fluid concentration measurement
M. Fabian (2013)
10.1109/JMEMS.2009.2031675
Field-Concentrator-Based Resonant Magnetic Sensor With Integrated Planar Coils
S. Brugger (2009)
Microfabricated liquid density sensors using polyimide-guided surface acoustic waves
Andrew Turton (2006)
10.1039/c3lc51273h
Nanomechanical identification of liquid reagents in a microfluidic channel.
M. Faheem Khan (2014)
10.1109/JSEN.2013.2288106
In-Situ Measurement of Fluid Density Rapidly Using a Vibrating Piezoresistive Microcantilever Sensor Without Resonance Occurring
L. Zhao (2014)
10.1109/ICSENS.2007.4388620
Silicon Straight Tube Fluid Density Sensor
M. Najmzadeh (2007)
10.1109/JSEN.2011.2167716
Physical Sensors for Liquid Properties
B. Jakoby (2011)
Semantic Scholar Logo Some data provided by SemanticScholar