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Optical Properties Of Ultrathin ZnO Films Fabricated By Atomic Layer Deposition

Liping Fang, Haolin Li, Haolin Li, Xuhang Ma, Qiuming Song, R. Chen
Published 2020 · Materials Science

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Abstract Ultrathin zinc oxide (ZnO) films with thickness down to several nanometers have been fabricated by atomic layer deposition. The chemical composition, surface morphology, crystalline structure, optical properties and photoluminescence characteristics of the ZnO films with various thicknesses were investigated. The X-ray photoelectric spectroscopy illustrates that the deposited films are uniformly distributed with zinc and oxygen atoms. Spectroscopic ellipsometric measurements reveal that both the refractive index and extinction coefficient decrease monotonically as the thickness of the film decreases. The thickness of the ZnO films obtained via ellipsometry is consistent with X-ray reflectivity measurements. The excitonic emission peak of the photoluminescence spectrum shifts to higher energies when the film thickness decreases to a few nanometers. This blueshift phenomenon is consistent with the expansion of the fundamental optical bandgap determined from ellipsometry, which could be well described by the effective mass model using physically meaningful parameters. The results obtained in this study could provide guidance to the design and optimization of optoelectronic devices based on ultrathin ZnO films.
This paper references
10.1088/0957-4484/27/47/475703
Pulsed laser deposition of two-dimensional ZnO nanocrystals on Au(111): growth, surface structure and electronic properties.
F. Tumino (2016)
10.1063/1.1940137
Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition
S. T. Tan (2005)
Atomic layer deposition of emerging 2D semiconductors
M. Mattinen (2019)
10.1021/CM020607+
Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques
J. Elam (2003)
Dielectric function parametric model, and method of use, in, US Patents
C M Herzinger (1998)
10.1016/J.MATLET.2011.10.072
Effects of phosphorus doping in ZnO nanocrystals by metal organic chemical vapor deposition
Jie Jiang (2012)
10.1016/J.APSUSC.2017.08.233
Facile preparation of polyethylenimine-tannins coated SiO 2 hybrid materials for Cu 2+ removal
Q. Huang (2018)
Structural , optical , and electrical characterization of ZnO and Al - doped ZnO thin fi lms deposited by MOCVD
M. E. Fragala
Guide to Using WVASE32: Spectroscopic Ellipsometry Data
J. A. Wollam Co (2008)
Handbook of Silicon Wafer Cleaning
K. Reinhardt (2018)
Dielectric function parametric model
C. M. Herzinger (1998)
10.1021/acs.chemmater.9b03237
Superior Atomic Layer Deposition Technology for Amorphous Oxide Semiconductor Thin-Film Transistor Memory Devices
Shi-Jin Ding (2020)
10.1021/ic201327n
Absorption and fluorescence spectroscopy of growing ZnO quantum dots: size and band gap correlation and evidence of mobile trap states.
T. J. Jacobsson (2011)
10.1016/S0038-1098(02)00537-9
Difference in optical bandgap between zinc-blende and wurtzite ZnO structure formed on sapphire (0001) substrate
G. Lee (2002)
Origin of the red emission in zinc oxide L
V. Kumar (2013)
10.1021/ACS.JPCC.5B12263
Enhancement of Electronic and Optical Properties of ZnO/Al2O3 Nanolaminate Coated Electrospun Nanofibers
R. Viter (2016)
10.1021/acs.jpclett.8b02474
Origin of Prestress-Driven Optical Modulations of Flexible ZnO Thin Films Processed in Stretching Mode.
H. Choi (2018)
10.1063/1.3514254
In situ synchrotron x-ray characterization of ZnO atomic layer deposition
D. Fong (2010)
Zinc Oxide: Fundamentals
H. Morkoç (2008)
ZnO: growth
D. P. Norton (2004)
10.1063/1.1527690
Self-organized ZnO quantum dots on SiO2/Si substrates by metalorganic chemical vapor deposition
S. Kim (2002)
10.1016/J.TSF.2014.02.004
Dielectric function of zinc oxide thin films in a broad spectral range
E. Mammadov (2014)
10.1016/S0927-796X(02)00063-3
Progress in the room-temperature optical functions of semiconductors
A. Djurisic (2002)
10.1063/1.4868338
A study on the evolution of dielectric function of ZnO thin films with decreasing film thickness
X. Li (2014)
10.1016/J.JALLCOM.2016.05.289
ZnO thin films prepared by atomic layer deposition at various temperatures from 100 to 180 °C with three-pulsed precursors in every growth cycle
Yung-Chen Cheng (2016)
10.1021/cr900056b
Atomic layer deposition: an overview.
S. George (2010)
10.1038/srep01714
Exciton and core-level electron confinement effects in transparent ZnO thin films
A. Mosquera (2013)
10.1088/0034-4885/72/12/126501
Fundamentals of zinc oxide as a semiconductor
A. Janotti (2009)
10.1063/1.1992666
A COMPREHENSIVE REVIEW OF ZNO MATERIALS AND DEVICES
Ü. Özgür (2005)
Absorption and fl uorescence spectroscopy of growing ZnO quantum dots : Size and band gap correlation and evidence of mobile trap states , lnorg
T. Edvinsson Jacobsson (1998)
10.1016/J.APSUSC.2019.02.133
Growing invisible silica nanowires on fused silica plates provides highly transparent and superwetting substrates
Yi Ci Tsai (2019)
A
M. Baitimirova (2016)
10.1016/S0169-4332(99)00601-7
X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films
M. Chen (2000)
10.1021/nl304433m
Exciton localization and optical properties improvement in nanocrystal-embedded ZnO core-shell nanowires.
Rui Chen (2013)
10.3762/bjnano.4.78
Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition
A. Abou Chaaya (2013)
10.1016/J.CPLETT.2005.05.027
Band gap variation of size-controlled ZnO quantum dots synthesized by sol-gel method
K. Lin (2005)
10.1016/J.MATLET.2013.03.073
Origin of the red emission in zinc oxide nanophosphors
V. Kumar (2013)
Handbook of X-Ray Photoelectron Spectroscopy
J. Moulder (1992)
ff ects of phosphorus doping in ZnO nanocrystals by metal organic chemical vapor deposition
L. Zhu
10.1021/ACS.JPCC.6B07221
Tuning of Structural and Optical Properties of Graphene/ZnO Nanolaminates
M. Baitimirova (2016)
10.1039/B310404D
Understanding the quantum size effects in ZnO nanocrystals
R. Viswanatha (2004)
10.1201/B15040
CRC Handbook of Chemistry and Physics
W. M. Haynes (1990)
10.1016/J.APSUSC.2004.08.037
Influence of different post-treatments on the structure and optical properties of zinc oxide thin films
Ruijin Hong (2005)
ff ect of substrates and thickness on optical properties in atomic layer deposition grown ZnO thin fi lms
J. Singhal (2014)
10.1063/1.3202399
Stress-induced anomalous shift of optical band gap in ZnO:Al thin films
B. C. Mohanty (2009)
10.1063/1.4757907
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
Ville Miikkulainen (2013)
10.1002/adma.201100423
Room temperature excitonic whispering gallery mode lasing from high-quality hexagonal ZnO microdisks.
Rui Chen (2011)
10.1016/J.APSUSC.2018.11.064
A kinetic study of ZnO atomic layer deposition: Effects of surface hydroxyl concentration and steric hindrance
Sung-joon Kim (2019)
10.1063/1.4918933
Stress-induced anomalous shift of optical band gap in Ga-doped ZnO thin films: Experimental and first-principles study
Yaqin Wang (2015)
Atomic Layer Deposition of Emerging 2 D Semiconductors , HfS 2 and ZrS 2 , for Optoelectronics
Miika Mattinen (2019)
10.1103/PHYSREV.56.978
The Scherrer Formula for X-Ray Particle Size Determination
A. Patterson (1939)
10.1016/J.SOLMAT.2017.05.040
Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
B. Macco (2017)
10.1021/ACS.CHEMMATER.9B01688
Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics
Miika Mattinen (2019)
10.1007/978-3-642-34243-1_7
X-Ray Reflectivity
A. Gibaud (2013)
10.1016/j.bios.2018.09.038
Atomic layer deposition for biosensing applications.
Octavio Graniel (2018)
10.1016/J.MATTOD.2014.04.026
A brief review of atomic layer deposition: from fundamentals to applications
R. Johnson (2014)
Structural
M. E. Fragala (2009)
10.1116/1.5113631
Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
Rafaiel A Ovanesyan (2019)
10.1063/1.2217925
Size dependence of photoluminescence and resonant Raman scattering from ZnO quantum dots
Hsin Min Cheng (2006)
10.1016/J.APSUSC.2013.09.099
Transparent and conducting intrinsic ZnO thin films prepared at high growth-rate with c-axis orientation and pyramidal surface texture
P. Mondal (2013)
Atomic layer deposition for membranes: Basics
M. Weber (2018)
10.1063/1.1705722
Strain relaxation and its effect in exciton resonance energies of epitaxial ZnO layers grown on 6H-SiC substrates
A.B.M.A. Ashrafi (2004)
Origin of the red emission in zinc oxide L. Fang
V Kumar (2020)
10.1016/S1369-7021(04)00287-1
ZnO: growth, doping & processing
D. Norton (2004)
Spectroscopic Ellipsometry: Principles and Applications
H. Fujiwara (2007)
10.1063/1.370744
OPTICAL PROPERTIES OF EPITAXIALLY GROWN ZINC OXIDE FILMS ON SAPPHIRE BY PULSED LASER DEPOSITION
X. Sun (1999)
10.1021/ACS.CHEMMATER.8B02687
Atomic Layer Deposition for Membranes: Basics, Challenges, and Opportunities
M. Weber (2018)
Li
A. B. Djurišić (2002)
10.1063/1.3010376
Quantum confinement effect in ZnO thin films grown by pulsed laser deposition
J. Nie (2008)
10.1021/JP411970W
Tuning Optical Properties of Al2O3/ZnO Nanolaminates Synthesized by Atomic Layer Deposition
A. A. Chaaya (2014)
10.1088/0268-1242/27/7/074011
ALD grown zinc oxide with controllable electrical properties
E. Guziewicz (2012)
10.1002/CVDE.200906790
Structural, Optical, and Electrical Characterization of ZnO and Al-doped ZnO Thin Films Deposited by MOCVD†
M. E. Fragalà (2009)
10.1016/J.APSUSC.2016.10.130
Effect of substrates and thickness on optical properties in atomic layer deposition grown ZnO thin films
D. Pal (2017)
10.1063/1.367375
On the optical band gap of zinc oxide
V. Srikant (1998)
Pearton (Eds.), Zinc Oxide Bulk, Thin Films and Nanostructures: Processing
S.J.C. Jagadish (2006)
CRC Handbook of Chemistry and Physics
R. C. Weast (1973)
10.1063/1.3601479
Uniaxial tensile strain and exciton–phonon coupling in bent ZnO nanowires
R. Chen (2011)
10.1117/12.351667
Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications
B. Johs (1999)
10.1063/1.447218
Electron-electron and electron-hole interactions in small semiconductor crystallites : The size dependence of the lowest excited electronic state
L. Brus (1984)
10.1016/J.APSUSC.2014.04.073
Multiple oscillator models for the optical constants of polycrystalline zinc oxide thin films over a wide wavelength range
J. M. Khoshman (2014)
Pulsed laser deposition of two-dimensional ZnO nanocrystals on Au(111): growth
F. Tumino (2016)



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