Online citations, reference lists, and bibliographies.
← Back to Search

Complementary Metal Oxide Semiconductor Cantilever Arrays On A Single Chip: Mass-sensitive Detection Of Volatile Organic Compounds.

D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, H. Baltes
Published 2002 · Medicine, Chemistry

Cite This
Download PDF
Analyze on Scholarcy
Share
The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of volatile organic compounds was investigated. Industrial complementary metal oxide semiconductor (CMOS) technology combined with subsequent CMOS-compatible micromachining was used to fabricate a single-chip system comprising the transducers and all necessary driving and signal-conditioning circuitry. An analytical model was developed to describe the mass-sensing mechanism of polymer-coated resonant cantilevers. The model was validated by measurements of various gaseous analytes. As an exemplary application, the quantitative analysis of a binary mixture using an array of four cantilevers is described. Experimental results are given for the concentration prediction of a mixture of n-octane and toluene. Finally, it was established that the limit of detection achieved with cantilever sensors is comparable to that of other acoustic wave-based gas sensors.



This paper is referenced by
10.1109/JMEMS.2004.832195
A sweeping mode integrated fingerprint sensor with 256 tactile microbeams
B. Charlot (2004)
10.1088/0957-4484/16/4/045
Out-of-plane electrostatic actuation of microcantilevers
S. O'Shea (2005)
10.1002/9783527616718.ch9
CMOS‐based Biochemical Sensing Systems
J. Lichtenberg (2005)
10.1109/SENSOR.2007.4300668
Novel Temperature Compensation Scheme Formicroresonators Based on Controlled Stiffnessmodulation
J. H. Seo (2007)
10.1063/1.2952050
Temperature compensation method for resonant microsensors based on a controlled stiffness modulation
J. H. Seo (2008)
10.1088/0960-1317/16/10/038
A platform for monolithic CMOS-MEMS integration on SOI wafers
M. Villarroya (2006)
10.1109/ICSENS.2007.4388589
Coupling High Force Sensitivity and High Stiffness in Piezoresistive Cantilevers with Embedded Si-Nanowires
K. Naeli (2007)
10.1016/J.SNB.2014.04.038
Portable low-power electronic interface for explosive detection using microcantilevers
D. Garcia-Romeo (2014)
10.1007/3-540-26914-2_6
Microfabricated Cantilever Array Sensors for (Bio-)Chemical Detection
H. Lang (2006)
10.1039/C6RA21077E
Reduced graphene oxide–polyethylene oxide hybrid films for toluene sensing at room temperature
Y. Su (2016)
10.33915/etd.4328
Fabrication and functional analysis of SPARROW biosensor
P. Poloju (2007)
10.1109/JMEMS.2019.2908879
Distributed MEMS Mass-Sensor Based on Piezoelectric Resonant Micro-Cantilevers
P. Joshi (2019)
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Humidity Sensing
Zhou Zheng (2019)
10.1080/87559129.2011.595022
Active and Intelligent Packaging for the Food Industry
D. A. Pereira de Abreu (2012)
10.1088/1361-6439/AAEDF9
Dynamic bifurcation MEMS gas sensors
M. S. Al-Ghamdi (2019)
10.1016/J.SNB.2011.02.050
Unconventional uses of microcantilevers as chemical sensors in gas and liquid media
I. Dufour (2012)
10.1063/1.4824855
Time frequency property for a micro resonant gas sensor
L. Xu (2013)
10.1016/S1043-4526(09)58005-9
Nanostructured materials in the food industry.
M. Augustin (2009)
10.1590/S0101-20612010000300002
Potenciais aplicações de nanotecnologia no setor agro-alimentar
Mário Garcia (2010)
10.1142/S0219455410003567
A NOVEL TECHNIQUE FOR MASS DETECTION OF A PIEZOELECTRIC CANTILEVER USING ACTIVE BIFURCATIONS
Shih-Hsun Yin (2010)
10.1039/c1lc20011a
An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid.
V. Agache (2011)
10.1109/ICSENS.2010.5690518
An analytical model of a thermally excited microcantilever vibrating laterally in a viscous fluid
S. Heinrich (2010)
10.1002/adma.201004052
Bioinspired optoelectronic nose with nanostructured wavelength-scalable hollow-core infrared fibers.
Adem Yildirim (2011)
10.1088/0034-4885/74/3/036101
Cantilever-like micromechanical sensors
A. Boisen (2011)
10.1016/J.SNB.2004.11.086
An alternative solution to improve sensitivity of resonant microcantilever chemical sensors: comparison between using high-order modes and reducing dimensions
F. Lochon (2005)
Film Bulk Acoustic Resonators of High Quality Factors in Liquid Environments for Biosensing Applications
W. Xu (2012)
10.1109/JSEN.2006.888600
Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors
I. Dufour (2007)
10.1016/J.SNB.2008.08.030
Electrically stretched capacitive membranes for stiffness sensing and analyte concentration measurement
S. Sivaramakrishnan (2008)
10.1016/J.PROENG.2010.09.283
Unconventional Uses of Cantilevers for Chemical Sensing in Gas and Liquid Environments
Isabelle Dufour (2010)
10.3390/s20113251
A New Method for the Measurement of the Diffusion Coefficient of Adsorbed Vapors in Thin Zeolite Films, Based on Magnetoelastic Sensors
D. Kouzoudis (2020)
10.1002/ADMA.200701667
Bimaterial Microcantilevers as a Hybrid Sensing Platform
S. Singamaneni (2008)
Analytical modeling of a novel microdisk resonator for liquid-phase sensing: an all-shear interaction device (ASID)
M. S. Sotoudegan (2016)
See more
Semantic Scholar Logo Some data provided by SemanticScholar