Online citations, reference lists, and bibliographies.
← Back to Search

Surface Charge Sensitivity Of Silicon Nanowires: Size Dependence.

Niklas Elfström, R. Juhász, I. Sychugov, Torun Engfeldt, A. Karlström, J. Linnros
Published 2007 · Medicine, Materials Science

Cite This
Download PDF
Analyze on Scholarcy
Share
Silicon nanowires of different widths were fabricated in silicon on insulator (SOI) material using conventional process technology combined with electron-beam lithography. The aim was to analyze the size dependence of the sensitivity of such nanowires for biomolecule detection and for other sensor applications. Results from electrical characterization of the nanowires show a threshold voltage increasing with decreasing width. When immersed in an acidic buffer solution, smaller nanowires exhibit large conductance changes while larger wires remain unaffected. This behavior is also reflected in detected threshold shifts between buffer solutions of different pH, and we find that nanowires of width >150 nm are virtually insensitive to the buffer pH. The increased sensitivity for smaller sizes is ascribed to the larger surface/volume ratio for smaller wires exposing the channel to a more effective control by the local environment, similar to a surrounded gate transistor structure. Computer simulations confirm this behavior and show that sensing can be extended even down to the single charge level.
This paper references



This paper is referenced by
10.1002/cphc.201100918
Silicon-based ion-sensitive field-effect transistor shows negligible dependence on salt concentration at constant pH.
O. Knopfmacher (2012)
10.1016/j.trac.2013.02.004
Strategies for enhancing the analytical performance of nanomaterial-based sensors
Celine I. L. Justino (2013)
10.1016/J.SNB.2015.05.022
Flexible NWs sensors in polymer, metal oxide and semiconductor materials for chemical and biological detection
J. Li (2015)
A Biotechnology Perspective on Silicon Nanowire FETs for Biosensor Applications
Nima Jokilaakso (2013)
SURFACE FUNCTIONALIZATION OF A SILICON NANOWIRE FIELD-EFFECT TRANSISTOR (SINW-FET) FOR miRNA DETECTION
Anca A. Telembeci (2019)
10.3390/s101109808
Optical Sensing with Simultaneous Electrochemical Control in Metal Nanowire Arrays
R. MacKenzie (2010)
Development of gold enhanced surface plasmon resonance polymer and nanowire waveguides for optical sensing
Charusluk Viphavakit (2018)
10.1063/1.4748931
Noise spectroscopy as an equilibrium analysis tool for highly-sensitive electrical biosensing
Q. Guo (2012)
10.1088/0957-4484/22/13/135503
Surface potential variations on a silicon nanowire transistor in biomolecular modification and detection.
Chia-Chang Tsai (2011)
10.1088/0957-4484/26/49/495501
Ionic screening effect on low-frequency drain current fluctuations in liquid-gated nanowire FETs.
M. Lu (2015)
10.1007/978-3-642-29268-2_5
Dielectric Detection Using Biochemical Assays
Y. Choi (2013)
10.1021/nl4037559
Diameter-independent hole mobility in Ge/Si core/shell nanowire field effect transistors.
Binh-Minh Nguyen (2014)
10.3390/s8031400
Electrochemical Biosensors - Sensor Principles and Architectures
Dorothee Grieshaber (2008)
10.1063/1.4762012
Thermionic field emission in gold nitride Schottky nanodiodes
Nikolaos Spyropoulos-Antonakakis (2012)
10.1097/POC.0000000000000091
Integration of Silicon and Printed Electronics for Rapid Diagnostic Disease Biosensing
Zari Tehrani (2016)
10.1039/c2lc40555e
SOI nanowire for the high-sensitive detection of HBsAg and α-fetoprotein.
Y. Ivanov (2012)
10.1016/J.MEE.2012.03.017
Vertically stacked Si nanostructures for biosensing applications
E. Buitrago (2012)
10.1021/acsnano.7b02986
Experimental Study of the Detection Limit in Dual-Gate Biosensors Using Ultrathin Silicon Transistors.
T. Wu (2017)
10.1109/DRC.2013.6633887
Functionalized 3D 7×20-array of vertically stacked SiNW FET for streptavidin sensing
E. Buitrago (2013)
Silizium Nanoribbon Feld-Effekt Transistoren zur Kopplung an elektroaktive Zellen
M. Jansen (2014)
10.3390/bios1030070
Review of Transducer Principles for Label-Free Biomolecular Interaction Analysis
Martin Nirschl (2011)
10.1109/TNANO.2011.2157519
Investigation of Size Dependence on Sensitivity for Nanowire FET Biosensors
J. Ahn (2011)
10.1038/srep12286
A Highly Responsive Silicon Nanowire/Amplifier MOSFET Hybrid Biosensor
J. Lee (2015)
10.5451/UNIBAS-006055062
Silicon nanowire field-effect transistors for sensing applications
A. Tarasov (2012)
10.3390/mi6081135
Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration
Cheng-Chih Hsu (2015)
10.1016/J.SNB.2018.09.114
Silicon nanowire pH sensors fabricated with CMOS compatible sidewall mask technology
K. Zhou (2019)
10.1016/j.aca.2014.03.016
Silicon nanowires as field-effect transducers for biosensor development: a review.
M. O. Noor (2014)
Modeling and simulation of field-effect biosensors
A. Bulyha (2011)
10.1007/s00216-011-5231-9
CMOS image sensor for detection of interferon gamma protein interaction as a point-of-care approach
M. Marimuthu (2011)
10.3390/s18103304
Characterization of the Piezoresistive Effects of Silicon Nanowires
Seohyeong Jang (2018)
10.4310/CMS.2012.V10.N2.A13
Existence and local uniqueness for 3d self-consistent multiscale models of field-effect sensors
S. Baumgartner (2012)
10.1201/B10851-7
Bioaffinity Sensors Based on MOS Field-Effect Transistors
D. Landheer (2011)
See more
Semantic Scholar Logo Some data provided by SemanticScholar