Online citations, reference lists, and bibliographies.
← Back to Search

Study On The Formation Of Self-assembled Monolayers On Sol-gel Processed Hafnium Oxide As Dielectric Layers.

Guy G Ting, Orb Acton, H. Ma, Jae Won Ka, A. Jen
Published 2009 · Medicine, Chemistry

Cite This
Download PDF
Analyze on Scholarcy
High dielectric constant (k) metal oxides such as hafnium oxide (HfO2) have gained significant interest due to their applications in microelectronics. In order to study and control the surface properties of hafnium oxide, self-assembled monolayers (SAMs) of four different long aliphatic molecules with binding groups of phosphonic acid, carboxylic acid, and catechol were formed and characterized. Surface modification was performed to improve the interface between metal oxide and top deposited materials as well as to create suitable dielectric properties, that is, leakage current and capacitance densities, which are important in organic thin film transistors. Attenuated total reflectance Fourier transform infrared (ATR-FTIR) spectroscopy, contact angle goniometry, atomic force microscopy (AFM), and simple metal-HfO2-SAM-metal devices were used to characterize the surfaces before and after SAM modification on sol-gel processed hafnium oxide. The alkylphosphonic acid provided the best monolayer formation on sol-gel processed hafnium oxide to generate a well-packed, ultrathin dielectric exhibiting a low leakage current density of 2x10(-8) A/cm2 at an applied voltage of -2.0 V and high capacitance density of 0.55 microF/cm2 at 10 kHz. Dialkylcatechol showed similar characteristics and the potential for using the catechol SAMs to modify HfO2 surfaces. In addition, the integration of this alkylphosphonic acid SAM/hafnium oxide hybrid dielectric into pentacene-based thin film transistors yields low-voltage operation within 1.5 V and improved performance over bare hafnium oxide.

This paper is referenced by
Polymer immobilization to metal oxide substrates through catechol derivatives as surface anchors
Barbora Mališová (2010)
A biomimetic principle for the chemical modification of metal surfaces: synthesis of tripodal catecholates as analogues of siderophores and mussel adhesion proteins.
Elisa Franzmann (2011)
Phosphonate coupling molecules for the control of surface/interface properties and the synthesis of nanomaterials.
G. Guerrero (2013)
Low-voltage, high-performance polymeric field-effect transistors based on self-assembled monolayer-passivated HfOx dielectrics: Correlation between trap density, carrier mobility, and operation voltage
Dae Kyu Kim (2019)
Highly efficient dye-sensitized solar cells based on HfO2 modified TiO2 electrodes
Parthiban Ramasamy (2013)
Covalent surface modification of oxide surfaces.
S. Pujari (2014)
Tribological and stability investigations of alkylphosphonic acids on alumina surface
M. Cichomski (2013)
Growth and Manipulation of Organic Semiconductors Microcrystals by Wet Lithography
Denis Gentili (2016)
Solid-State Densification of Spun-Cast Self-Assembled Monolayers for Use in Ultra-Thin Hybrid Dielectrics.
Daniel O. Hutchins (2012)
Solution-deposited organic-inorganic hybrid multilayer gate dielectrics. Design, synthesis, microstructures, and electrical properties with thin-film transistors.
Y. Ha (2011)
Sol-gel derived low temperature HfO2-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs)
M. G. Rao (2018)
Aggregated States of Chalcogenorhodamine Dyes on Nanocrystalline Titania Revealed by Doubly Resonant Sum Frequency Spectroscopy
Sanghamitra Sengupta (2017)
Multifunctional Self-Assembled Monolayers for Organic Field-Effect Transistors
Nathan Cernetic (2016)
Synthesis of fluorescent carboxylic acid ligands for construction of monolayers on nanostructures
Sushilkumar A. Jadhav (2012)
Simultaneous Modification of Bottom-Contact Electrode and Dielectric Surfaces for Organic Thin-Film Transistors Through Single-Component Spin-Cast Monolayers
Orb Acton (2011)
Investigating phosphonate monolayer stability on ALD oxide surfaces
Brittany Branch (2014)
Mesostructured HfO2/Al2O3 Composite Thin Films with Reduced Leakage Current for Ion-Conducting Devices
Mohamed Barakat Zakaria (2019)
Low-temperature sol-gel ZrHfO2-PMMA hybrid dielectric thin-films for metal oxide TFTs
M. G. Syamala Rao (2018)
Photonic curing of sol–gel derived HfO2 dielectrics for organic field-effect transistors
K. Tetzner (2014)
GO/C2S Gate Dielectric Material for Nanoscale Devices Obtained via Pechini Method
Hussein Salmani (2019)
Significance of the amide functionality on DOPA-based monolayers on gold.
D. Ribena (2012)
Ambient-processable high capacitance hafnia-organic self-assembled nanodielectrics.
K. Everaerts (2013)
High refractive index and high transparency HfO2 nanocomposites for next generation lithography
Woo Jin Bae (2010)
A "clickable" titanium surface platform.
M. A. Watson (2010)
Zirconium oxide dielectric layer grown by a surface sol–gel method for low-voltage, hysteresis-free, and high-mobility polymer field effect transistors
Byung Tack Lim (2016)
Key Issues With Printed Flexible Thin Film Transistors and Their Application in Disposable RF Sensors
J. Noh (2015)
Computation of Dielectric Response in Molecular Solids for High Capacitance Organic Dielectrics.
Henry M. Heitzer (2016)
Effect of substrate temperature on vapor-phase self-assembly of n-octylphosphonic acid monolayer for low-voltage organic thin-film transistors
Swati A. Gupta (2013)
Self-assembled monolayers (SAMs) of carboxylic acids: an overview
S. A. Jadhav (2011)
Effects of self-assembled monolayer structural order, surface homogeneity and surface energy on pentacene morphology and thin film transistor device performance.
Daniel O. Hutchins (2013)
Kovalente Oberflächenmodifikationen von Oxiden
S. Pujari (2014)
Study of the surface modification with oleic acid of nanosized HfO2 synthesized by the polymerized complex derived sol–gel method
Rodolfo Ramos-González (2012)
See more
Semantic Scholar Logo Some data provided by SemanticScholar