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High-density Integration Of Carbon Nanotubes Via Chemical Self-assembly.
Hongsik Park, A. Afzali, Shu-jen Han, G. Tulevski, A. Franklin, J. Tersoff, J. Hannon, W. Haensch
Published 2012 · Materials Science, Medicine
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Carbon nanotubes have potential in the development of high-speed and power-efficient logic applications. However, for such technologies to be viable, a high density of semiconducting nanotubes must be placed at precise locations on a substrate. Here, we show that ion-exchange chemistry can be used to fabricate arrays of individually positioned carbon nanotubes with a density as high as 1 × 10(9) cm(-2)-two orders of magnitude higher than previous reports. With this approach, we assembled a high density of carbon-nanotube transistors in a conventional semiconductor fabrication line and then electrically tested more than 10,000 devices in a single chip. The ability to characterize such large distributions of nanotube devices is crucial for analysing transistor performance, yield and semiconducting nanotube purity.
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