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Investigation Of Zr And Si Diffusion Behaviors During Reactive Diffusion – A Molecular Dynamics Study

Hui-Lung Chen, Shin-Pon Ju, Tsang-Yu Wu, Jin-Yuan Hsieh, Shih-Hao Liu

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Molecular dynamics simulation was used to investigate the diffusion behaviors of Zr and Si atoms during a reactive diffusion which produces Zr silicide.