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Extensions Of The Stoney Formula For Substrate Curvature To Configurations With Thin Substrates Or Large Deformations

L. B. Freund, J. Floro, E. Chason
Published 1999 · Physics

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Two main assumptions which underlie the Stoney formula relating substrate curvature to mis-match strain in a bonded thin film are that the film is very thin compared to the substrate, and the deformations are infinitesimally small. Expressions for the curvature-strain relastionship are derived for cases in which thses assumptions are relaxed, thereby providing a biasis for interpretation of experimental observations for a broader class of film-substrate configurations.
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