Online citations, reference lists, and bibliographies.
← Back to Search

Ultrasensitive Mass Sensor Fully Integrated With Complementary Metal-oxide-semiconductor Circuitry

E. Forsén, G. Abadal, S. Ghatnekar-Nilsson, J. Teva, J. Verd, R. Sandberg, W. Svendsen, F. Pérez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, A. Boisen
Published 2005 · Physics

Cite This
Download PDF
Analyze on Scholarcy
Share
Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4 ag/Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip.
This paper references
10.1109/JMEMS.2005.844845
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
J. Verd (2005)
10.1088/0957-4484/12/2/305
Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection
G. Abadal (2001)
10.1116/1.591247
Fabrication and characterization of nanoresonating devices for mass detection
Z. Davis (2000)
Ultrasensitive mass sensor fully integrated with complementary metal - oxide - semiconductor circuitry
J Teva (2005)
10.1088/0960-1317/6/4/011
Elastic properties and microstructure of LPCVD polysilicon films
D. Maier-Schneider (1996)
10.1063/1.1396633
Single-crystal aluminum nitride nanomechanical resonators
A. Cleland (2001)
Ultrasensitive mass sensor fully integrated with complementary metal - oxide - semiconductor circuitry
E. S. Forsén (2005)
10.1016/S0924-4247(02)00307-2
Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators
D. Lange (2003)
10.1088/0957-4484/16/1/020
Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography
S. Ghatnekar-Nilsson (2005)
10.1063/1.1569050
Femtogram mass detection using photothermally actuated nanomechanical resonators
N. Lavrik (2003)
10.1201/9780203718841
Theory of vibration with applications
W. Thomson (1965)
10.1038/35104535
Smart single-chip gas sensor microsystem
C. Hagleitner (2001)
10.1063/1.1642738
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
K. Ekinci (2004)
10.1016/S0924-4247(03)00208-5
Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry
Z. Davis (2003)
10.1063/1.1650542
Attogram detection using nanoelectromechanical oscillators
B. Ilic (2004)
10.1016/S0924-4247(99)00319-2
Mechanical behavior of ultrathin microcantilever
Jinling Yang (2000)
10.1063/1.1755417
Ultrasensitive nanoelectromechanical mass detection
K. Ekinci (2004)
10.1088/0957-4484/15/10/021
Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
E. Forsén (2004)



This paper is referenced by
10.1063/1.2216033
Electromechanically driven and sensed parametric resonance in silicon microcantilevers
M. Requa (2006)
10.1039/c003770m
High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS.
K. Ekinci (2010)
10.1088/0960-1317/17/11/027
Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)
H. Campanella (2007)
10.1063/1.3654023
Mass sensing based on a circuit cavity electromechanical system
C. Jiang (2011)
Integration of CMOS-MEMS resonators for radiofrequency applications in the VHF and UHF bands
Jordi Teva Meroño (2007)
10.6092/polito/porto/2639290
Microcantilever-based sensing arrays for evaluation of biomolecular interactions
Palmara Gianluca (2016)
10.1063/1.2217161
Cantilever based mass sensor with hard contact readout
S. Dohn (2006)
10.1109/TBCAS.2019.2926836
Correlation of Capacitance and Microscopy Measurements Using Image Processing for a Lab-on-CMOS Microsystem
Bathiya Senevirathna (2019)
10.1063/1.3305464
Theoretical and experimental investigation of optically driven nanoelectromechanical oscillators
B. Ilić (2010)
10.1088/0034-4885/74/3/036101
Cantilever-like micromechanical sensors
A. Boisen (2011)
10.1016/J.SNB.2007.11.016
A CMOS-based integrated-system architecture for a static cantilever array
M. Zimmermann (2008)
10.1201/b13065-8
Cantilever-Based Sensors
Maria Tenje (2012)
10.3390/mi7090160
Micromachined Resonators: A Review
R. Abdolvand (2016)
10.1063/1.2753120
Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions
J. Verd (2007)
10.1109/IMTC.2011.5944026
Lateral cantilever beam in BESOI technology
Salvatore Baglio (2011)
10.1557/OPL.2011.1214
Post-CMOS Integration of Nanomechanical Devices by Direct Ion Beam Irradiation of Silicon
F. Pérez-Murano (2011)
10.1038/srep09926
NEMS With Broken T Symmetry: Graphene Based Unidirectional Acoustic Transmission Lines
Mehdi B. Zanjani (2015)
10.1109/MEMSYS.2006.1627740
Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator
Wei Pang (2006)
10.1063/1.2234305
Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators
H. Campanella (2006)
10.1039/B707401H
Micro- and nanomechanical sensors for environmental, chemical, and biological detection.
P. Waggoner (2007)
10.1155/2009/637874
Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection
X. Li (2009)
10.1007/s12154-010-0043-5
Quantitative proteomics: assessing the spectrum of in-gel protein detection methods
Victoria J. Gauci (2011)
10.1109/SENSOR.2007.4300112
Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation
J. Verd (2007)
10.1007/s10544-008-9223-2
Nanogram per milliliter-level immunologic detection of alpha-fetoprotein with integrated rotating-resonance microcantilevers for early-stage diagnosis of heptocellular carcinoma
Y. Liu (2009)
10.1186/1556-276X-6-570
Mass spectrometry based on a coupled Cooper-pair box and nanomechanical resonator system
C. Jiang (2011)
10.1109/TRANSDUCERS.2017.7994240
Sensitive resonant gas sensor operating in air with metal organic frameworks coating
N. Jaber (2017)
10.1109/ULTSYM.2006.460
P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators
H. Campanella (2006)
10.1063/1.2213950
Pulsed mode operation of strained microelectromechanical resonators in air
V. Cimalla (2006)
10.1063/1.2766840
Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique.
S. Kim (2007)
Development of nonlinear and coupled microelectromechanical oscillators for sensing applications
Barry E. DeMartini (2008)
10.1109/ICSENS.2018.8589701
Smart Gas Sensing and Actuation Using Multimode of a MOFs Coated Microbeam
N. Jaber (2018)
Nanomechanical Sensors: Analyzing Effects of Laser-Nanowire Interaction and Electrodeposited Clamps on Resonance Spectra by
Fan Weng (2016)
See more
Semantic Scholar Logo Some data provided by SemanticScholar