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Rolled-up Micro- And Nanotubes From Single-material Thin Films

R. Songmuang, C. Deneke, O. Schmidt
Published 2006 · Physics

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The authors fabricate well-positioned and size-scalable semiconductor micro- and nanotubes from single-material layers. The tubes form when a partially strain-relaxed film, grown at low substrate temperatures, is released from the substrate by selective underetching. The layer rolls downwards or upwards depending on whether it is initially tensile or compressively strained. They create silicon and indium-gallium-arsenide tubes with diameters accurately tunable by varying the layer thickness. They draw a simple model to describe the mechanism responsible for the tube formation from a single-material thin film. Moreover, the tube diameters are shown to scale with strain and layer thickness.
This paper references
10.1063/1.1373408
Free-standing SiGe-based nanopipelines on Si (001) substrates
O. Schmidt (2001)
10.1063/1.104898
Low‐temperature growth of Ge on Si(100)
D. Eaglesham (1991)
10.1063/1.1795973
Real-time formation, accurate positioning, and fluid filling of single rolled-up nanotubes
C. Deneke (2004)
10.1116/1.572361
GexSi1−x/Si strained‐layer superlattice grown by molecular beam epitaxy
J. Bean (1984)
Quantum Dot Heterostructures
D. Bimberg (1999)
10.1038/35065525
Nanotechnology: Thin solid films roll up into nanotubes
O. Schmidt (2001)
10.1063/1.2164913
Electron microscopy study on structure of rolled-up semiconductor nanotubes
N. Y. Jin-Phillipp (2006)
10.1063/1.98667
Relaxation of strained-layer semiconductor structures via plastic flow
B. Dodson (1987)
10.1063/1.2356998
Structural characterization and potential x-ray waveguiding of a small rolled-up nanotube with a large number of windings
C. Deneke (2006)
10.1063/1.1819976
Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors
M. L. Lee (2005)
10.1021/NL025693R
2D-Confined Nanochannels Fabricated by Conventional Micromachining
N. Tas (2002)
10.1063/1.96206
Calculation of critical layer thickness versus lattice mismatch for GexSi1−x/Si strained‐layer heterostructures
R. People (1985)
10.1103/PHYSREVB.42.11690
Microstructure and strain relief of Ge films grown layer by layer on Si(001).
Legoues (1990)
10.1016/0022-0248(74)90424-2
Defects in epitaxial multilayers: I. Misfit dislocations*
J. W. Matthews (1974)
10.1063/1.2186509
Light emission and wave guiding of quantum dots in a tube
S. Mendach (2006)
10.1016/S1386-9477(99)00249-0
Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays
V. Prinz (2000)
10.1016/S0022-0248(98)01414-6
Surface morphology evolutions during the first stages of epitaxial growth of Si on Ge(0 0 1) : a RHEED study
D. Dentel (1999)
10.1109/JSTQE.2002.804235
Self-assembled nanoholes, lateral quantum-dot molecules, and rolled-up nanotubes
O. Schmidt (2002)
10.1063/1.1613366
Nanoscroll formation from strained layer heterostructures
M. Grundmann (2003)
10.1063/1.1622800
Optical actuation of micromirrors fabricated by the micro-origami technique
J. M. Z. Ocampo (2003)
10.1109/5.219338
Strained layer heterostructures, and their applications to MODFETs, HBTs, and lasers
H. Morkoç (1993)
10.1063/1.1755835
Radial superlattices and single nanoreactors
C. Deneke (2004)
10.1103/PHYSREVLETT.64.1943
Dislocation-free Stranski-Krastanow growth of Ge on Si(100).
Eaglesham (1990)



This paper is referenced by
10.1002/adma.201604572
Deterministic Self-Rolling of Ultrathin Nanocrystalline Diamond Nanomembranes for 3D Tubular/Helical Architecture.
Ziao Tian (2017)
10.3970/CMES.2008.026.091
Atomic-scale modeling of self-positioning nanostructures
Y. Nishidate (2008)
10.1002/adma.201200574
Thinning and shaping solid films into functional and integrative nanomembranes.
G. Huang (2012)
10.1533/9780857091420.2.247
11 - Strain engineering of silicon–germanium (SiGe) micro- and nanostructures
F. Pezzoli (2011)
10.1039/C1JM11258A
Fabrication of carbon microtubes from thin films of supramolecular assembliesvia self-rolling approach
K. Kumar (2011)
10.1002/ADMT.201800486
Rolled‐up Nanotechnology: Materials Issue and Geometry Capability
C. Xu (2018)
10.1021/JP308854T
Exploring Rolled-up Au–Ag Bimetallic Microtubes for Surface-Enhanced Raman Scattering Sensor
Y. Yin (2012)
10.1039/b810419k
Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells.
G. Huang (2009)
10.1063/1.2992195
Fabrication and electrical characterization of Si-based rolled-up microtubes
F. Cavallo (2008)
10.1021/NN900580J
Fabrication, self-assembly, and properties of ultrathin AlN/GaN porous crystalline nanomembranes: tubes, spirals, and curved sheets.
Y. Mei (2009)
10.1016/J.TSF.2009.04.069
Planar to cage mode switching in carbon nanostructure growth on bimetallic micro-scrolls
Youngsik Song (2009)
10.1088/0953-8984/21/22/225008
In situ stress evolution during and after sputter deposition of Al thin films.
M. Pletea (2009)
10.1002/POLB.24322
Patterning of spontaneous rolling thin polymer films for versatile microcapillaries
Rémy Brossard (2017)
10.1201/9781420093551-C11
Optofluidic Ring Resonators
J. Suter (2010)
10.1103/PHYSREVAPPLIED.5.017001
Mechanical Self-Assembly of a Strain-Engineered Flexible Layer: Wrinkling, Rolling, and Twisting
Z. Chen (2015)
10.1002/adma.201701732
Fabrication of Millimeter-Long Carbon Tubular Nanostructures Using the Self-Rolling Process Inherent in Elastic Protein Layers.
Hyojin Ko (2017)
10.1039/C2JM33846G
Nano- and microstructured gold tubes for surface-enhanced Raman scattering by vapor-induced strain of thin films
J. Ye (2012)
10.1073/pnas.0907795106
Thickness–radius relationship and spring constants of cholesterol helical ribbons
B. Khaykovich (2009)
10.1039/c4nr00316k
Grating-structured metallic microsprings.
T. Huang (2014)
10.1007/978-1-4419-9822-4_9
Strain-Induced, Self Rolled-Up Semiconductor Microtube Resonators: A New Architecture for Photonic Device Applications
Xin He Miao (2011)
10.1088/0022-3727/42/5/055001
Fabrication of ferromagnetic rolled-up microtubes for magnetic sensors on fluids
E. B. Ureña (2009)
10.1002/PSSB.201248387
Strain profiles and radii of semiconductor rolled-up tubes made by a single material
D. Laniel (2013)
10.1002/tcr.201800007
Responsive and Adaptive Micro Wrinkles on Organic-inorganic Hybrid Materials.
M. Takahashi (2018)
10.1063/1.2978239
On-chip Si/SiOx microtube refractometer
A. Bernardi (2008)
10.1038/AM.2012.40
Strain-driven self-rolling of hybrid organic–inorganic microrolls: interfaces with self-assembled particles
M. Takahashi (2012)
10.1002/smll.201701630
Direct Microrolling Processing on a Silicon Wafer.
K. Aoki (2017)
Structure, microstructure and magnetic properties of electrodepositedCo and Co-Pt in different nanoscale geometries
Manvendra Singh Khatri (2010)
10.1021/acsnano.7b03219
In-Plane Thermal Conductivity of Radial and Planar Si/SiOx Hybrid Nanomembrane Superlattices.
G. Li (2017)
10.1016/J.JCRYSGRO.2007.11.044
InGaAs/GaAs 3D architecture formation by strain-induced self-rolling with lithographically defined rectangular stripe arrays
I. S. Chun (2008)
Verspannungsgetriebene Architekturen auf der Basis von Si-Nanomembranen
F. Cavallo (2009)
10.1063/1.2828043
Modified Timoshenko formula for bending of ultrathin strained bilayer films
Ji Zang (2008)
10.1016/J.MEE.2007.01.089
From rolled-up Si microtubes to SiOx/Si optical ring resonators
R. Songmuang (2007)
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