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A Reliable Scheme For Fabricating Sub-5 Nm Co-planar Junctions For Single-molecule Electronics

M. Saifullah, T. Ondarcu̧hu, D. K. Koltsov, C. Joachim, M. Welland
Published 2002 · Materials Science

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We demonstrate a high yield production scheme to fabricate sub-5 nm co-planar metal–insulator–metal junctions. This involves determining the relationship between the actual gap between the metallic junctions for a given designed gap, and the use of weak developers with ultrasonic agitation to process the exposed resist. This results in an improved process to achieve narrow inter-electrode gaps. The gaps were imaged using an AFM equipped with a carbon nanotube tip to achieve a high degree of accuracy in measurement. The smallest gap unambiguously measured was ~ 2 nm. Gaps with ≤ 5 nm spacing were produced with a very high yield of about 75% for a designed inter-electrode distance of 0 nm. The leakage resistance of the gaps was found to be of the order of 1012 Ω. The entire junction structure was designed to be co-planar to better than 1 nm over 1 μ m2.
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This paper is referenced by
10.1109/NANO.2004.1392384
Fabrication of nanoelectrodes for hybrid molecular-electronic devices
A. Della Torre (2004)
Nanostructuration de surfaces de silicium pour guider la croissance auto-organisée de nanostructures métalliques
Amanda Martinez-Gil (2005)
10.1039/c2nr32232c
Robust nanogap electrodes by self-terminating electroless gold plating.
Victor M Serdio V (2012)
10.1380/EJSSNT.2003.41
A Reliable Method for Fabricating sub-10 nm Gap Junctions Without Using Electron Beam Lithography
Y. Naitoh (2003)
10.1016/J.TSF.2005.07.031
Direct fabrication of nano-gap electrodes by focused ion beam etching
T. Nagase (2006)
Theory of Electronic Transport Through Molecular Nanostructures
Wissenschaftliche Berichte (2005)
10.1016/S1573-4331(08)00014-0
Chapter 14 STM Manipulation and Dynamics
A. Mayne (2008)
10.1063/1.2785982
Controlled fabrication of 1–2nm nanogaps by electromigration in gold and gold-palladium nanowires
F. O. Hadeed (2007)
10.1088/0957-4484/16/8/034
Nanometre spaced electrodes on a cleaved AlGaAs surface
Sebastian M. Luber (2005)
10.1063/1.3437589
E-beam lithography for micro-nanofabrication.
Matteo Altissimo (2010)
10.1002/9783527653454.CH4
Organic Circuits and Organic Single‐Molecule Transistors
Q. Tang (2013)
10.1088/1464-4258/8/4/S05
REVIEW ARTICLE: Near-field optical properties of top-down and bottom-up nanostructures
C. Girard (2006)
10.1088/0957-4484/20/48/485202
Fabrication of shuttle-junctions for nanomechanical transfer of electrons.
A. Moskalenko (2009)
Angle-Resolved Plasmonic Properties of Single Gold Nanorod Dimers
Jian WuXuxing (2014)
10.1103/PHYSREVB.98.165417
Directional and angular locking in the driven motion of Au islands on MoS2
Felix Trillitzsch (2018)
10.1196/annals.1292.005
Molecular Landers as Probes for Molecular Device—Metal Surface Interactions
SUKHEN C. Ghosh (2003)
10.1002/smll.200801400
Planar nanogap electrodes by direct nanotransfer printing.
S. Strobel (2009)
10.1002/SMLL.200600389
High-aspect-ratio nanogap electrodes for averaging molecular conductance measurements.
Sebastian M. Luber (2007)
10.1116/1.2781573
Ultrahigh vacuum scanning tunneling microscope manipulation of single gold nanoislands on MoS2 for constructing planar nanointerconnects
J. Yang (2007)
10.1021/am403115m
Self-aligned formation of sub 1 nm gaps utilizing electromigration during metal deposition.
Y. Naitoh (2013)
10.1088/1757-899X/6/1/012033
Transferring metallic nano-island on hydrogen passivated silicon surface for nano-electronics
Jie Deng (2009)
10.1049/IP-CDS:20040957
Fabrication of nanoscale device using individual colloidal gold nanoparticles
S. Khondaker (2004)
10.1364/ome.409302
Direct laser writing lithography using a negative-tone electron-beam resist
Hyo-Sop Kim (2020)
10.1088/0953-8984/22/8/084025
Multiple atomic scale solid surface interconnects for atom circuits and molecule logic gates.
C. Joachim (2010)
10.1002/smll.201501283
Nanogap Electrodes towards Solid State Single-Molecule Transistors.
Ajuan Cui (2015)
10.17863/CAM.16720
Pattern replication in organic-inorganic hybrid materials
M. Nedelcu (2014)
10.1515/nanoph-2019-0158
A review of 2D and 3D plasmonic nanostructure array patterns: fabrication, light management and sensing applications
Sujan Kasani (2019)
10.1098/rsta.2003.1270
Molecular bioelectronics
J. J. Davis (2003)
10.1088/0957-4484/20/15/155304
The fabrication of embedded co-planar electrodes using a self-assembled monolayer molecular resist.
S. Johnson (2009)
10.1007/s40820-014-0011-7
Angle-Resolved Plasmonic Properties of Single Gold Nanorod Dimers
J. Wu (2014)
10.1039/B506240N
Molecular three-terminal devices: fabrication and measurements.
H. V. D. van der Zant (2006)
10.1088/0957-4484/21/45/455301
Flip-chip fabrication of nanoscale co-planar embedded electrodes with controlled exposed areas.
Isa Kiyat (2010)
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