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A CMOS-compatible Fluid Density Sensor

D. Westberg, O. Paul, G. Andersson, H. Baltes
Published 1997 · Materials Science

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We report a CMOS-compatible resonant sensor to measure the density of fluids. The device is fabricated using a standard CMOS process followed by simple post-processing consisting of sacrificial aluminium etching and silicon bulk micromachining. The sample volume of liquid probed by the resonating structure is only 11 pl.
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