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Monolithic Radio Frequency SiN X Self-rolled-up Nanomembrane Interdigital Capacitor Modeling And Fabrication

Lei Sang, Hao Zhou, Zhendong Yang, Mark D Kraman, Haojie Zhao, Julian A Michaels, Dane J Sievers, Jose E Schutt-aine, Xiuling Li, Wen Huang

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