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Growth And Properties Of Self-assembled Monolayers On Metals

Y. Zhuang, Ole Hansen, J. He
Published 2008 · Materials Science

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Self-assembled monolayers (SAMs) grown from organosilane are promising candidate for anti-stiction coatings. It is well know that the application of hydrocarbon- and fluorocarbon-based SAMs can significantly reduce stiction and adhesion in silicon micro/nanostructures in Micro-Electro-Mechancial System (MEMS). There are often various metals involved in MEMS, such as Au, Al, Ti, etc. In the process of growing anti-stiction SAMs on the silicon microstructures, SAM will be unavoidably deposited on the metals, which will significantly change surface properties of the materials. Therefore, it is necessary to investigate how the organosilane SAMs grow on the metals, and affect the surface properties of the materials. In this paper, CF3(CF2)5(CH2)2SiCl3 (FOTS) SAMs were grown on various metals using a vapour phase process in a home-made setup. The metals investigated are thin film Pd, Au, Ni, Al, Ti, Cr with thickness of 100 nm, which are deposited on monocrystal-silicon substrates using e-beam evaporation. The SAMs were characterized by static contact angle, surface energy, roughness, nano-scale adhesion force and friction force.
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