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Fabrication Of Silicon Nanopillar Arrays By Electron Beam Lithography And Reactive Ion Etching For Advanced Bacterial Adhesion Studies

P. Doll, A. Alahmad, A. Bacher, A. Muslija, R. Thelen, L. Hahn, Ralf Ahrens, B. Spindler, A. Guber
Published 2019 · Materials Science

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