Online citations, reference lists, and bibliographies.
← Back to Search

Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor For Biomolecular Detection

T.P. Burg, A. Mirza, N. Milović, C.H. Tsau, G. F. Popescu, J. Foster, S. Manalis
Published 2006 · Materials Science

Cite This
Download PDF
Analyze on Scholarcy
Share
There is a great need in experimental biology for tools to study interactions between biological molecules and to profile expression levels of large numbers of proteins. This paper describes the fabrication, packaging and testing of a resonant mass sensor for the detection of biomolecules in a microfluidic format. The transducer employs a suspended microchannel as the resonating element, thereby avoiding the problems of damping and viscous drag that normally degrade the sensitivity of resonant sensors in liquid. Our device differs from a vibrating tube densitometer in that the channel is very thin, which enables the detection of molecules that bind to the channel walls; this provides a path to specificity via molecular recognition by immobilized receptors. The fabrication is based on a sacrificial polysilicon process with low-stress low-pressure chemical-vapor deposited (LPCVD) silicon nitride as the structural material, and the resonator is vacuum packaged on the wafer scale using glass frit bonding. Packaged resonators exhibit a sensitivity of 0.8 ppm/(ngmiddotcm2) and a mechanical quality factor of up to 700. To the best of our knowledge, this quality factor is among the highest so far reported for resonant sensors with comparable surface mass sensitivity in liquid
This paper references
10.1016/S1389-1723(01)80127-4
On the adsorption of proteins on solid surfaces, a common but very complicated phenomenon.
K. Nakanishi (2001)
10.1016/S0925-4005(98)00127-0
A silicon-based ultrasonic immunoassay for detection of breast cancer antigens
Albert Wang (1998)
10.1109/MEMSYS.1997.581826
A CMOS-compatible device for fluid density measurements
D. Westberg (1997)
10.1590/S0103-50532003000400002
Piezoelectric quartz crystal sensors applied for bioanalytical assays and characterization of affinity interactions
P. Skládal (2003)
10.1021/AC049859F
Micromechanical detection of proteins using aptamer-based receptor molecules.
C. Savran (2004)
10.1016/J.CES.2005.06.024
Mass transport and surface reactions in microfluidic systems
T. Gervais (2006)
10.1016/S0925-4005(98)00321-9
Surface plasmon resonance sensors: review
J. Homola (1999)
10.1021/AC011269J
Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds.
D. Lange (2002)
10.1063/1.1605238
Microfabricated mechanical biosensor with inherently differential readout
C. Savran (2003)
10.1063/1.113896
Detection of mercury vapor using resonating microcantilevers
T. Thundat (1995)
10.1063/1.1847729
Study of the noise of micromechanical oscillators under quality factor enhancement via driving force control
J. Tamayo (2005)
10.1006/JMBI.1999.2829
The packing density in proteins: standard radii and volumes.
J. Tsai (1999)
10.1063/1.1650542
Attogram detection using nanoelectromechanical oscillators
B. Ilic (2004)
10.1073/pnas.232276699
Electronic detection of DNA by its intrinsic molecular charge
J. Fritz (2002)
10.1109/JMEMS.2003.818452
Fluid damping in resonant flexural plate wave device
M. Weinberg (2003)
10.1088/0960-1317/15/8/026
Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs
D. Sparks (2005)
Integrated optical biosensors for environmental monitoring
A. Turner (1995)
10.1038/nbt0901-856
Bioassay of prostate-specific antigen (PSA) using microcantilevers
G. Wu (2001)
This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination. IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING Building Energy Management: Integrated Control of Acti
Västra Frölunda, Sweden [Online]. Available: http:// www.q-sense
Q-Sense Ab
Manalis received the B.S. degree in physics from the University of California
R Scott (1998)
10.1126/SCIENCE.1062711
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
Yunlong Cui (2001)
10.1063/1.1794378
Virus detection using nanoelectromechanical devices
B. Ilic (2004)
Currently, she is a Sr. Packaging Engineer at Intel Corporation
10.1016/S0142-9612(02)00103-5
Optical grating coupler biosensors.
J. Vörös (2002)
10.1038/nrd838
Optical biosensors in drug discovery
M. Cooper (2002)
10.1016/J.AB.2004.03.028
Analysis of small-molecule interactions using Biacore S51 technology.
D. Myszka (2004)
10.1016/S0956-5663(99)00040-8
Commercial quartz crystal microbalances-Theory and applications
C. O'Sullivan (1999)
10.1529/BIOPHYSJ.103.030072
The density and refractive index of adsorbing protein layers.
J. Vörös (2004)
Vacuum - packaged suspended microchannel resonant mass sensor for biomolecular detection
S. R. Manalis
10.1126/SCIENCE.288.5464.316
Translating biomolecular recognition into nanomechanics.
J. Fritz (2000)
10.1063/1.99047
Fluid loading of a Lamb‐wave sensor
R. White (1988)
Optical grating coupler biosensors Integrated - optical biosensors
J. Voros (1997)
10.1016/0924-4247(90)87028-H
Input and output grating couplers as integrated optical biosensors
W. Lukosz (1990)
10.1063/1.1611625
Suspended microchannel resonators for biomolecular detection
T. Burg (2003)
10.1116/1.589750
Nanochannel fabrication for chemical sensors
M. Stern (1997)
10.1109/JMEMS.2005.845405
Micromachined acoustic resonant mass sensor
H. Zhang (2005)
10.1109/MEMSYS.1995.472540
Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensor
P. Enoksson (1995)



This paper is referenced by
10.1021/AC0520689
Label-free microelectronic PCR quantification.
C. J. Hou (2006)
10.1039/c8nr08763f
Sink or float? Characterization of shell-stabilized bulk nanobubbles using a resonant mass measurement technique† †Electronic supplementary information (ESI) available: Experimental details, supporting information. See DOI: 10.1039/c8nr08763f
C. Hernandez (2019)
Enabling high-throughput single-cell growth measurements with parallel microchannel resonators
Nathan Cermak (2017)
10.1063/1.4770321
Beam model and three dimensional numerical simulations on suspended microchannel resonators
K. Huang (2012)
10.1109/JMEMS.2019.2920329
Very High-Frequency Silicon Carbide Microdisk Resonators With Multimode Responses in Water for Particle Sensing
H. Jia (2019)
10.1109/ICECE.2010.727
Research on Web-Based Typical Process Management
Yang Zhi-gang (2010)
10.1088/1361-6439/ab6df1
Suspended micro/nano channel resonators: a review
A. D. Pastina (2020)
10.1038/nature05741
Weighing of biomolecules, single cells and single nanoparticles in fluid
T. Burg (2007)
10.1016/J.APSUSC.2011.04.096
UV lithography-based protein patterning on silicon: Towards the integration of bioactive surfaces and CMOS electronics
S. Lenci (2011)
10.1088/0960-1317/23/11/115015
An optimal design of thermal-actuated and piezoresistive-sensed CMOS-MEMS resonant sensor
C. Wang (2013)
10.1039/b920275g
Enclosed pillar arrays integrated on a fluidic platform for on-chip separations and analysis.
N. Lavrik (2010)
10.1063/1.3305464
Theoretical and experimental investigation of optically driven nanoelectromechanical oscillators
B. Ilić (2010)
Array of microfluidic beam resonators for mass sensing applications - Design, Fabrication and Testing
Marquez Villalobos (2016)
10.1016/J.TSF.2016.09.003
Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability
M. Wu (2016)
10.1088/0960-1317/24/5/055005
Ultrasensitive resonant MEMS transducers with tunable coupling
M. Manav (2013)
Development of nonlinear and coupled microelectromechanical oscillators for sensing applications
Barry E. DeMartini (2008)
10.1038/nbt.3666
High-throughput measurement of single-cell growth rates using serial microfluidic mass sensor arrays
Nathan Cermak (2016)
10.1111/J.1475-1305.2008.00463.X
The Future of Microelectromechanical systems (MEMS)
T. Marinis (2009)
10.1109/JMEMS.2011.2179010
Electromechanical Transconductance Properties of a GaN MEMS Resonator With Fully Integrated HEMT Transducers
M. Faucher (2012)
10.1146/annurev-anchem-060908-155232
Micro- and nanocantilever devices and systems for biomolecule detection.
K. S. Hwang (2009)
10.1063/1.4937151
Mass correlation spectroscopy for mass- and size-based nanoparticle characterization in fluid
Mario M. Modena (2015)
10.1039/c1lc20608g
High-resolution cantilever biosensor resonating at air-liquid in a microchannel.
Jungwook Park (2011)
10.2514/6.2009-2661
Feedback Delays for Vibration Mitigation and External Disturbance Rejection at the Microscale
Y. Qaroush (2009)
10.1016/J.MSEC.2010.07.002
Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications
S. Lenci (2010)
10.3390/s16060758
Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
A. Bouchaala (2016)
10.1109/JMEMS.2009.2025999
Enhancing Parametric Sensitivity in Electrically Coupled MEMS Resonators
P. Thiruvenkatanathan (2009)
Development of a microfluidic interface for suspended microchannel resonators
D. Maillard (2016)
10.1016/J.SNB.2011.02.012
A microfluidic sensor based on ferromagnetic resonance induced in magnetic bead labels
E. Chatterjee (2011)
10.1088/1361-6528/aa57aa
Sensing of single electrons using micro and nano technologies: a review.
J. Jalil (2017)
10.1109/JMEMS.2019.2906586
Optically Accessible MEMS Resonant Mass Sensor for Biological Applications
Ethan G. Keeler (2019)
10.1039/B707401H
Micro- and nanomechanical sensors for environmental, chemical, and biological detection.
P. Waggoner (2007)
Development of a microfluidic device based on Deterministic Lateral Displacement (DLD) for biological sample preparation, towards the extraction of extracellular vesicles
Eloïse Pariset (2018)
See more
Semantic Scholar Logo Some data provided by SemanticScholar