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Vapor-Phase Self-Assembled Monolayers For Anti-Stiction Applications In MEMS

Y. Zhuang, O. Hansen, T. Knieling, C. Wang, P. Rombach, W. Lang, W. Benecke, M. Kehlenbeck, J. Koblitz
Published 2007 · Materials Science

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We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.
This paper references
10.1109/TDMR.2005.846976
Liquid and vapor phase silanes coating for the release of thin film MEMS
B. Parvais (2005)
10.1016/0924-4247(90)85069-G
The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers
H. Guckel (1990)
10.1116/1.1875232
Wettability and thermal stability of fluorocarbon films deposited by deep reactive ion etching
Yanxin Zhuang (2005)
10.1021/LA000471Z
Self-Assembly Is Not the Only Reaction Possible between Alkyltrichlorosilanes and Surfaces: Monomolecular and Oligomeric Covalently Attached Layers of Dichloro- and Trichloroalkylsilanes on Silicon
Alexander Y. Fadeev and (2000)
Self - assembled monolayers as anti - sticiton coatings for MEMS : Characteristics and recent developments
C. Yau (2000)
10.1023/A:1014044207344
Tribological Challenges in Micromechanical Systems
R. Maboudian (2002)
Thermal behavior of alkyl - siloxane self - assembled monolayers on the oxidized Si ( 100 ) surface
R. Maboudian J. Fréchette
10.1007/S11249-005-8551-0
Frictional Responses of Octadecyltrichlorosilane (OTS) and 1H, 1H, 2H, 2H-Perfluorooctyltrichlorosilane (FOTS) Monolayers Self-assembled on Aluminium over Six Orders of Contact Length Scale
O. Khatri (2005)
10.1021/JA00116A019
Alkyl Monolayers on Silicon Prepared from 1-Alkenes and Hydrogen-Terminated Silicon
M. R. Linford (1995)
10.1116/1.1336833
Amino-terminated self-assembled monolayer on a SiO2 surface formed by chemical vapor deposition
A. Hozumi (2001)
10.1016/S0924-4247(97)01628-2
HF/H2O vapor etching of SiO2 sacrificial layer for large-area surface-micromachined membranes
J. Anguita (1998)
Thermal behaviour of perfluoroalkylsiloxane monolayers on the oxidized Si(100) surface
J Fréchette
10.1021/LA00023A072
Silanization of Solid Substrates: A Step Toward Reproducibility
J. Brzoska (1994)
10.1109/84.911089
A new organic modifier for anti-stiction
Bong Hwan Kim (2001)
10.1117/12.531798
Improved vapor-phase deposition technique for antistiction monolayers
Robert W. Ashurst (2003)
10.1023/A:1019119608713
Molecular contributions to the frictional properties of fluorinated self-assembled monolayers
H. Kim (1998)
10.1109/84.679393
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
U. Srinivasan (1998)
10.1103/PHYSREVB.63.245412
Nanotribological properties and mechanisms of alkylthiol and biphenyl thiol self-assembled monolayers studied by AFM
B. Bhushan (2001)
Handbook of Nanotechnology
B. Bhushan (2004)
10.1163/15685610360554384
Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory
K. Komvopoulos (2003)
10.1016/S0924-4247(03)00023-2
Wafer level anti-stiction coatings for MEMS
W. R. Ashurst (2003)
Alkyltricholorosilane-based self-assembled monolayer films for stiction reduction in silicon micromahines
U. Srinivasan (1998)
10.1021/LA035153P
Vapor-Phase Adsorption Kinetics of 1-Decene on H-Terminated Si(100)
M. R. Kosuri (2003)
Supercritical carbon dioxide drying of microstructures
I. B. Azouz J. B. Brzoska
Alkyltricholorosilane - based self - assembled monolayer films for stiction reduction in silicon micromahines
W. R. Ashurst Maboudian (1998)
10.1088/0960-1317/16/11/002
Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction
Yanxin Zhuang (2006)
10.1088/0960-1317/6/4/005
Stiction in surface micromachining
N. Tas (1996)
10.1016/S0924-4247(99)00337-4
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
R. Maboudian (2000)
10.1117/12.478206
Vapor deposition of amino-functionalized self-assembled monolayers on MEMS
M. G. Hankins (2003)
10.1021/LA00011A036
FTIR and AFM Studies of the Kinetics and Self-Assembly of Alkyltrichlorosilanes and (Perfluoroalkyl)trichlorosilanes onto Glass and Silicon
Reena Banga (1995)
10.1007/S11249-005-5085-4
Frictional dynamics of perfluorinated self-assembled monolayers on amorphous SiO2
C. Lorenz (2005)
10.1023/A:1019133222401
Adhesion-related failure mechanisms in micromechanical devices
C. Mastrangelo (1997)
10.1109/TDMR.2003.821540
Vapor phase anti-stiction coatings for MEMS
W. R. Ashurst (2003)
10.1116/1.589247
Critical Review: Adhesion in surface micromechanical structures
R. Maboudian (1997)
10.1016/J.SNB.2006.10.023
Gas phase hydrophobisation of MEMS silicon structures with self-assembling monolayers for avoiding in-use sticking
T. Knieling (2007)
10.1109/84.911090
Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer
W. R. Ashurst (2001)
10.1021/LA9809067
Fluoroalkylsilane Monolayers Formed by Chemical Vapor Surface Modification on Hydroxylated Oxide Surfaces
A. Hozumi (1999)
10.1021/LA053241Z
Thermal behavior of perfluoroalkylsiloxane monolayers on the oxidized Si(100) surface.
Joëlle Fréchette (2006)
Wafer level antistiction coatings for MEMS
W. R. Ashurst (2003)
10.1021/LA970135R
Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100) Surface
G. J. Kluth (1997)
10.1116/1.1288200
Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems
T. Mayer (2000)
Self-assembled monolayers as anti-sticiton coatings for MEMS: Characteristics and recent developments
R. Maboudian (2000)
10.1557/MRS2001.65
Tribology of MEMS
M. Boer (2001)
Molecular Vapor Deposition (MVD) for Improved SAM Coatings
Kobrin Boris (2005)
Supercritical carbon dioxide drying of microstructures
G. T. Mulhern (1993)



This paper is referenced by
Magneto-capillary valve for integrated biological sample preparation using magnetic microcarriers
D. Dulk (2011)
10.1364/OE.19.013707
Powerless tunable photonic crystal with bistable color and millisecond switching.
C. Chan (2011)
10.1016/J.TSF.2012.07.054
A vapor phase deposition of self-assembled monolayers: Vinyl-terminated films of volatile silanes on silicon oxide substrates
M. Adamkiewicz (2012)
COOPERATIVE CONTROL OF MULTIPLE UNTETHERED MAGNETIC MICROROBOTS FOR PRECISION MICROMANIPULATION
Nahum Arenas Torres (2016)
10.1007/978-3-319-67459-9_18
Surface Forces Between Hydrophobic Surfaces Obtained by Self-assembled Monolayers Deposition of Octadecyltrichlorosilane
A. Besleaga (2017)
10.1007/978-3-642-36935-3_1
Nanotribological Phenomena, Principles and Mechanisms for MEMS
B. Saha (2013)
10.1016/J.COLSURFA.2019.03.032
Surface wettability and stability of chemically modified silicon, glass and polymeric surfaces via room temperature chemical vapor deposition
V. Silverio (2019)
10.1115/1.4003810
Microcutting and forming of thin aluminium foils for MEMS
C. Damsgaard (2011)
10.1109/JMEMS.2009.2027503
Characterization of Stiction Accrual in a MEMS
R. Ranganathan (2009)
10.1039/c1lc20716d
A new method of UV-patternable hydrophobization of micro- and nanofluidic networks.
R. Arayanarakool (2011)
10.1021/ACS.JPCC.5B06321
Order of Dry and Wet Mixed-Length Self-Assembled Monolayers
A. Barrett (2015)
10.1016/j.apsusc.2019.145187
One-pot synthesis and self-assembly of anti-wear octadecyltrichlorosilane/silica nanoparticles composite films on silicon
Min Li (2020)
10.1021/la5011727
Bis(trifluoromethyl)methylene Addition to Vinyl-Terminated SAMs: A Gas-Phase C–C Bond-Forming Reaction on a Surface
M. Adamkiewicz (2014)
10.1364/osac.402405
X-ray verification of sol-gel resist shrinkage in substrate-conformal imprint lithography for a replicated blazed reflection grating
J. McCoy (2020)
10.1016/J.APSUSC.2010.12.052
Improved aging performance of vapor phase deposited hydrophobic self-assembled monolayers
A. Gnanappa (2011)
10.1039/c0lc00381f
A 'microfluidic pinball' for on-chip generation of Layer-by-Layer polyelectrolyte microcapsules.
C. Kantak (2011)
10.1016/J.WEAR.2015.12.010
Boundary lubrication effect of organic residue left on surface after evaporation of organic cleaning solvent
Anthony J. Barthel (2016)
10.1364/OE.18.020894
Tunable photonic crystal based on capillary attraction and repulsion.
C. Chan (2010)
10.1088/0960-1317/19/8/085022
Investigation and application of an ultrahydrophobic hybrid-structured surface with anti-sticking character
Yang Zonghan (2009)
10.1177/1350650114532630
Texture analysis of self-structured surfaces in formation process using directional fractal signature method
M. Wolski (2014)
10.1109/ECTC.2011.5898507
An investigation of stiction in poly-SiGe micromirror
F. Ling (2011)
10.1016/J.IJHEATMASSTRANSFER.2014.07.040
A molecular dynamics study on heat conduction characteristics inside the alkanethiolate SAM and alkane liquid
G. Kikugawa (2014)
10.1063/1.5144845
Vapor-phase deposition-based self-assembled monolayer for an electrochemical sensing platform
Ahn Jun Ki (2020)
10.1039/c0lc00513d
Engineering superlyophobic surfaces as the microfluidic platform for droplet manipulation.
Tianzhun Wu (2011)
10.1039/c7nr06896d
Controlling states of water droplets on nanostructured surfaces by design.
Chongqin Zhu (2017)
10.1007/s11249-014-0341-0
Nanotribological Behavior of Ultra-thin Al2O3 Films Prepared by Atomic Layer Deposition
Zhimin Chai (2014)
10.1007/978-3-642-03887-7_24
Manufacture of SU-8 Micro-Grippers for Mechanical Characterization of Gut Epithelial Cells
R. Mackay (2009)
10.1039/c7nr06471c
An ultra-low frictional interface combining FDTS SAMs with molybdenum disulfide.
X. Cao (2017)
10.1109/LED.2013.2269991
Invisible Surface Charge Pattern on Inorganic Electrets
Fei Wang (2013)
10.1039/B925970H
A robust superhydrophobic and superoleophobic surface with inverse-trapezoidal microstructures on a large transparent flexible substrate
M. Im (2010)
10.1088/1742-6596/152/1/012029
Growth and properties of self-assembled monolayers on metals
Y. Zhuang (2008)
10.1021/ACS.CHEMMATER.6B01036
Selective Growth of Titanium Nitride on HfO2 across Nanolines and Nanopillars
Sonali N. Chopra (2016)
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