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Sub-5nm All-Around Gate FinFET For Ultimate Scaling

H. Lee, L.-E. Yu, S.-W. Ryu, J.-W. Han, K. Jeon, D.-Y. Jang, K.-H. Kim, J. Lee, J.-H. Kim, S. Jeon, G. Lee, J. Oh, Y. Park, W. Bae, H. Lee, J. Yang, J. Yoo, S. Kim, Y.-K. Choi

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