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DOI: 10.1115/1.1615249

Humidity-Induced Voltage Shift On MEMS Pressure Sensors

J. A. Chiou, S. Chen, Jinbao Jiao
Published 2003 · Materials Science

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This paper references
10.1021/J100082A031
An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition Temperature
A. Parikh (1994)
10.2307/3615905
The Science of Soap Films and Soap Bubbles
C. Isenberg (1978)



This paper is referenced by
10.1007/978-0-387-47318-5_12
MEMS Packaging Materials
A. Darrin (2011)
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