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Chemical Vapor Deposition Of Fluoroalkylsilane Monolayer Films For Adhesion Control In Microelectromechanical Systems

T. Mayer, M. Boer, N. Shinn, P. Clews, T. Michalske
Published 2000 · Chemistry

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We have developed a new process for applying a hydrophobic, low adhesion energy coating to microelectromechanical (MEMS) devices. Monolayer films are synthesized from tridecafluoro-1,1,2,2-tetrahydrooctyltrichlorosilane (FOTS) and water vapor in a low-pressure chemical vapor deposition process at room temperature. Film thickness is self-limiting by virtue of the inability of precursors to stick to the fluorocarbon surface of the film once it has formed. We have measured film densities of {approx}3 molecules nm{sup 2} and film thickness of {approx}1 nm. Films are hydrophobic, with a water contact angle >110{sup o}. We have also incorporated an in-situ downstream microwave plasma cleaning process, which provides a clean, reproducible oxide surface prior to film deposition. Adhesion tests on coated and uncoated MEMS test structures demonstrate superior performance of the FOTS coatings. Cleaned, uncoated cantilever beam structures exhibit high adhesion energies in a high humidity environment. An adhesion energy of 100 mJ m{sup -2} is observed after exposure to >90% relative humidity. Fluoroalkylsilane coated beams exhibit negligible adhesion at low humidity and { 90% relative humidity. No obvious film degradation was observed for films exposed to >90% relative humidity at room temperature for >24 hr.
This paper references
10.1021/LA00044A014
Reaction of alkylchlorosilanes with silica at the solid/gas and solid/liquid interface
C. Tripp (1992)
10.1016/S0003-2670(00)82840-8
Applications of piezoelectric quartz crystal microbalances
C. Lu (1987)
10.1021/LA960934U
TRANSITION TEMPERATURES FOR N-ALKYLTRICHLOROSILANE MONOLAYERS
R. R. Rye (1997)
10.1063/1.370809
Accurate method for determining adhesion of cantilever beams
M. Boer (1999)
10.1021/J100082A031
An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition Temperature
A. Parikh (1994)
10.1109/SOLSEN.1992.228292
The effect of release-etch processing on surface microstructure stiction
R. L. Alley (1992)
10.1016/0022-2860(80)85214-8
Structure of crystalline polymers
H. Tadokoro (1979)
10.1021/LA970293I
Studies of molecular orientation and order in self-assembled semifluorinated n-alkanethiols : Single and dual component mixtures
M. Tsao (1997)
10.1021/LA970135R
Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100) Surface
G. J. Kluth (1997)
10.1016/S0167-5729(97)00014-9
Surface processes in MEMS technology
R. Maboudian (1998)
10.1557/PROC-518-131
Adhesion of polysilicon microbeams in controlled humidity ambients
M. Boer (1998)
10.1109/16.129094
Measurement of wear in polysilicon micromotors
M. Mehregany (1992)
10.1021/LA00007A007
Evidence for a Unique Chain Organization in Long Chain Silane Monolayers Deposited on Two Widely Different Solid Substrates
D. Allara (1995)
10.1016/0924-4247(90)85069-G
The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers
H. Guckel (1990)
10.1021/LA9705928
Thermal behavior of alkyl monolayers on silicon surfaces
M. Sung (1997)
10.1109/84.232594
Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments
C. Mastrangelo (1993)
10.1109/84.679393
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
U. Srinivasan (1998)
10.1021/LA00022A038
Role of Solvent on the Silanization of Glass with Octadecyltrichlorosilane
M. McGovern (1994)
10.1021/LA00001A027
Reaction of Methylsilanols with Hydrated Silica Surfaces: The Hydrolysis of Trichloro-, Dichloro-, and Monochloromethylsilanes and the Effects of Curing
C. Tripp (1995)
Ultrathin organic films: From Langmuir-Blodgett to self assembly
A. Ulman (1989)
10.1016/S0378-3812(98)00216-7
Intermolecular potentials and vapor-liquid phase equilibria of perfluorinated alkanes
Shengting Cui (1998)
10.1016/B978-0-444-42277-4.50007-7
Introduction, History, and Overview of Applications of Piezoelectric Quartz Crystal Microbalances
A. Czanderna (1984)
10.1109/84.232593
Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory
C. Mastrangelo (1993)
10.1021/LA00002A043
Determination of the Ordering of Alkylhalogenosilanes on a Silicon Substrate Using FTIR-ATR Spectroscopy
Reena Banga (1995)
10.1021/LA961091+
Vapor phase self-assembly of fluorinated monolayers on silicon and germanium oxide
P. Hoffmann (1997)
10.1063/1.118494
ATOMIC LAYER CONTROLLED GROWTH OF SIO2 FILMS USING BINARY REACTION SEQUENCE CHEMISTRY
J. Klaus (1997)
10.1021/LA00017A025
Chemical Vapor Surface Modification of Porous Glass with Fluoroalkyl-Functional Silanes. 1. Characterization of the Molecular Layer
Hiroaki Tada (1994)
10.1021/LA00004A029
Direct Observation of the Surface Bonds between Self-Assembled Monolayers of Octadecyltrichlorosilane and Silica Surfaces: A Low-Frequency IR Study at the Solid/Liquid Interface
C. Tripp (1995)
Wanhill, Fracture Mechanics (Edward Arnold and Delftse Uitgevers Maatschapij
R.J.H.H.L. Ewalds (1991)
10.1116/1.581214
Study of the desorption mechanism of alkylsiloxane self-assembled monolayers through isotopic labeling and high resolution electron energy-loss spectroscopy experiments
G. J. Kluth (1998)
10.1021/LA981064E
Thoughts on the structure of alkylsilane monolayers
M. Stevens (1999)



This paper is referenced by
10.1007/S11340-008-9158-9
A Linearized Method to Measure Dynamic Friction of Microdevices
A. Corwin (2008)
10.1201/9781420004922-9
Antistiction Layers for Nano Imprinting Lithography
Nam-Goo Cha (2017)
10.1002/marc.201800106
Enhanced Adhesion of Polydimethylsiloxane Using an Interlocked Finger Structure.
Suyeong An (2018)
10.1063/1.3249602
Nucleation threshold and deactivation mechanisms of nanoscopic cavitation nuclei
B. Borkent (2009)
10.1149/1.3611011
Hydrophobic Modification of Diamond Conditioner for Prevention of Particle Adhesion During Oxide CMP
I. Kim (2011)
10.1016/j.jcis.2009.07.020
Wettability of nanoengineered dual-roughness surfaces fabricated by UV-assisted capillary force lithography.
H. Jeong (2009)
10.1088/1742-6596/152/1/012029
Growth and properties of self-assembled monolayers on metals
Y. Zhuang (2008)
10.1109/JMEMS.2007.904342
Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS
Y. Zhuang (2007)
10.1063/1.1341225
Directional shear force microscopy
A. R. Burns (2001)
10.1016/J.SURFCOAT.2015.06.005
Ultra-oleophobic cotton fabric prepared using molecular and nanoparticle vapor deposition methods
P. Aminayi (2015)
10.1117/12.443009
Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
M. D. de Boer (2001)
10.1016/J.WEAR.2005.02.070
In situ wear studies of surface micromachined interfaces subject to controlled loading
Erin E. Flater (2006)
10.1080/00018732.2012.706401
David Adler Lectureship Award Talk: Friction and energy dissipation mechanisms in adsorbed
J. Krim (2014)
Test and characterization of engineering nanocoatings for mems and nanoenergetic materials
Ashwin Vijayasai (2012)
10.1002/9783527639915.CH9
Nanopatterning by Area‐Selective Atomic Layer Deposition
Han-Bo-Ram Lee (2012)
10.1021/JP303097V
Molecular Dynamics Simulations of Alkylsilane Monolayers on Silica Nanoasperities: Impact of Surface Curvature on Monolayer Structure and Pathways for Energy Dissipation in Tribological Contacts
Bradley W. Ewers (2012)
10.1117/12.655698
Adhesion between template materials and UV-cured nanoimprint resists
F. Houle (2006)
10.1002/0471440264.PST467
Chemical Vapor Deposition of Polymer Films
S. Seidel (2011)
10.1002/ADFM.200901688
Vapor-phase deposition of monofunctional alkoxysilanes for sub-nanometer-level biointerfacing on silicon oxide surfaces
B. Dorvel (2010)
10.1117/12.531798
Improved vapor-phase deposition technique for antistiction monolayers
Robert W. Ashurst (2003)
10.1007/S12541-011-0144-2
Characterizations of the interfacial energy in glass/resin laminates
J. Park (2011)
Novel Processes for Modular Integration of Silicon-Germanium MEMS with CMOS Electronics
C. W. Low (2007)
10.1063/1.5144845
Vapor-phase deposition-based self-assembled monolayer for an electrochemical sensing platform
Ahn Jun Ki (2020)
Fabrication of extremely smooth blazed diffraction gratings
C. Chang (2004)
10.1002/adom.202000898
Hybrid Photonic–Plasmonic Bound States in Continuum for Enhanced Light Manipulation
Maik Meudt (2020)
10.1117/12.478206
Vapor deposition of amino-functionalized self-assembled monolayers on MEMS
M. G. Hankins (2003)
10.1023/A:1014044207344
Tribological Challenges in Micromechanical Systems
R. Maboudian (2002)
10.3390/ma13153357
The Effect of Physicochemical Properties of Perfluoroalkylsilanes Solutions on Microtribological Features of Created Self-Assembled Monolayers
Michał Cichomski (2020)
10.1115/WTC2005-63717
MOLECULAR DESIGN OF DURABLE HYDROPHOBIC FILM
Kum Hwan Cha (2005)
10.1109/NANO.2006.247718
Pattern Generation by Using Multi-Step Room-Temperature Nanoimprint Lithography
Stefan Harrer (2006)
10.1016/J.SNA.2013.01.036
Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating
I. Laboriante (2013)
10.1116/1.1627814
Fabrication of sawtooth diffraction gratings using nanoimprint lithography
C. Chang (2003)
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