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Großflächige Röntgengitter Für Die Röntgen-Phasenkontrastbildgebung

J. Meiser
Published 2017 · Art

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.................................................................................................... vii Inhaltsverzeichnis ..................................................................................ix Abbildungsverzeichnis ...................................................................... xiii Tabellenverzeichnis ........................................................................... xvii 1 Einleitung ......................................................................................1 2 Stand der Technik ......................................................................5 2.1 Röntgenphasenkontrast-Verfahren ..............7 2.2 Talbot-Lau-Interferometer ............................ 12 2.3 Gitterfertigung ..................................................... 24 2.3.1 Anforderungen .................................................... 24 2.3.2 Siliziumätzen ........................................................ 27 2.3.3 Abscheideprozesse ............................................ 28 2.3.4 LIGA .......................................................................... 29 3 Steigerung der Gitterqualität ............................................. 37 3.1 Verstärkungslose Phasengitter mittels Gefriertrocknen................................................... 37 3.1.1 Prozesse ohne Kapillarkräfte ........................ 37
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