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Plasma Polymerization Of HMDSO With An Atmospheric Pressure Plasma Jet For Corrosion Protection Of Aluminum And Low‐Adhesion Surfaces

U. Lommatzsch, Joerg Ihde
Published 2009 · Materials Science

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Thin functional films were deposited on aluminum with an atmospheric pressure plasma jet using hexamethyldisiloxane (HMDSO) as precursor. A high dynamic deposition rate on the order of 450 nm · m · min -1 was achieved. Composition and structure of the thin films show a strong dependence on the downstream location of the precursor injection. A 4 mm downstream shift of the precursor injection increases the carbon content in the thin film by a factor of 2.5, as indicated by XPS analysis and alters the degree of cross-linking according to the FTIR spectra. The coating with the low carbon content (17 at.-%) provides corrosion resistance for aluminum 2024 unclad exposed for 96 h to a neutral salt spray test. The coating with the high carbon content reduces the adhesion of an epoxy resin to the surface and may be used as a release coating.
This paper references
Industrial Plasma Engineering: Volume 2: Applications to Nonthermal Plasma Processing
J. R. Roth (2001)
10.1088/0741-3335/42/10/201
The physics and chemistry of dusty plasmas
C. Hollenstein (2000)
10.1063/1.1305510
Atmospheric pressure plasma chemical vapor deposition system for high-rate deposition of functional materials
Y. Mori (2000)
10.1023/A:1011313322430
Overview of Atmospheric Pressure Discharges Producing Nonthermal Plasma
A. P. Napartovich (2001)
10.1002/PPAP.200400049
Open Air Deposition of SiO2 Films by an Atmospheric Pressure Line‐Shaped Plasma
X. D. Zhu (2005)
10.1016/S0042-207X(02)00763-7
Intermediate gas phase precursors during plasma CVD of HMDSO
D. Theirich (2003)
10.1016/S0257-8972(03)00556-5
Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge
A. Churpita (2003)
10.1002/PPAP.200800061
High-rate SiO2 deposition by oxygen cold arc plasma jet at atmospheric pressure
M. H. Han (2008)
10.1002/PPAP.200600051
Atomic Oxygen Production and Exploration of Reaction Mechanisms in a He‐O2 Atmospheric Pressure Glow Discharge Torch
V. Leveillé (2006)
10.1016/S0169-4332(98)00479-6
A study of HMDSO/O2 plasma deposits using a high-sensitivity and -energy resolution XPS instrument: curve fitting of the Si 2p core level
M. Alexander (1999)
10.1201/9781482269123
Non-Equilibrium Air Plasmas at Atmospheric Pressure
K. Becker (2004)
10.1116/1.1314395
Plasma deposition of optical films and coatings: A review
L. Martinů (2000)
10.1063/1.1618358
Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization
A. Grill (2003)
10.1002/PPAP.200800066
Pulsed Plasma Deposition from Vinyltrimethylsilane/Oxygen Mixtures
Adriano Francescangeli (2009)
10.1088/0963-0252/7/3/006
Deposition of silicon dioxide films with an atmospheric-pressure plasma jet
S. E. Babayan (1998)
10.1016/S0143-7496(01)00040-9
Characterisation and comparison of industrially pre-treated homopolymer polypropylene, HF 135M
M. Green (2002)
10.1016/J.IJADHADH.2003.09.006
Plasma jet treatment of five polymers at atmospheric pressure: surface modifications and the relevance for adhesion
M. Noeske (2004)
10.1088/0022-3727/34/1/315
Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry
D. Magni (2001)
10.1002/PPAP.200600202
Atmospheric‐Pressure Plasmas for Wide‐Area Thin‐Film Deposition and Etching
V. Hopfe (2007)
10.1063/1.110916
Open air deposition of SiO2 film from a cold plasma torch of tetramethoxysilane‐H2‐Ar system
K. Inomata (1994)
10.1016/S0042-207X(02)00765-0
The barrier discharge: basic properties and applications to surface treatment
Hans-Erich Wagner (2003)
10.1088/0022-3727/41/19/194010
Local deposition of SiOx plasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)
J. Schäfer (2008)
10.1063/1.106527
Development and application of a microbeam plasma generator
H. Koinuma (1992)
10.1016/J.SAB.2005.10.003
Atmospheric pressure plasmas: A review
C. Tendero (2006)
10.1002/PPAP.200732402
Atmospheric Pressure Plasma Jet Treatment of Polyethylene Surfaces for Adhesion Improvement
U. Lommatzsch (2007)
10.1109/27.747887
The atmospheric-pressure plasma jet: a review and comparison to other plasma sources
A. Schütze (1998)
10.1002/CVDE.200506385
Remote AP‐PECVD of Silicon Dioxide Films from Hexamethyldisiloxane (HMDSO)
S. Alexandrov (2005)
10.1088/0022-3727/28/8/015
Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge
Y. Sawada (1995)
10.1002/PPAP.200600114
Recent advances in the research on non-equilibrium atmospheric pressure plasma jets
J. Laimer (2007)
10.1002/CVDE.200606535
A Nonequilibrium, Atmospheric‐Pressure Argon Plasma Torch for Deposition of Thin Silicon Dioxide Films
T. P. Kasih (2007)
10.1002/PPAP.200500154
Growth and Modification of Organosilicon Films in PECVD and Remote Afterglow Reactors
P. Supiot (2006)
10.1002/PPAP.200700066
Arc-Free Atmospheric Pressure Cold Plasma Jets: A Review
M. Laroussi (2007)
10.1088/0741-3335/49/12B/S39
Thin film deposition by means of atmospheric pressure microplasma jet
J. Benedikt (2007)
10.1016/S0257-8972(03)00292-5
Surface modification for hydrophilic property of stainless steel treated by atmospheric-pressure plasma jet
M. C. Kim (2003)
10.1016/S0257-8972(03)00560-7
Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics
M. Kim (2003)
10.1021/JP0012449
Reaction Chemistry in the Afterglow of an Oxygen-Helium, Atmospheric-Pressure Plasma
J. Y. Jeong (2000)
10.1016/S0257-8972(99)00318-7
Overall kinetics of SiOx remote-PECVD using different organosilicon monomers
C. Bayer (1999)



This paper is referenced by
10.1109/PLASMA.2011.5993381
Modification of hydrophobicity of metallic surfaces with an atmospheric plasma jet
Rodrigo Palma (2011)
10.7567/JJAP.55.01AA04
Preparation of nitrogen doped silicon oxides thin films by plasma polymerization of 3-aminopropyltriethoxylsilane using atmospheric pressure plasma jet
Yu-chun Lin (2016)
10.1016/J.TSF.2020.138369
Multi-pass deposition of organosilicon-based superhydrophobic coatings in atmospheric pressure plasma jets
S. Asadollahi (2020)
Atmospheric pressure plasma jet for the deposition of nanocomposite antibacterial coatings
Xiaolong Deng (2015)
10.1007/s11090-012-9413-9
Applications of Plasma Technology in Development of Superhydrophobic Surfaces
R. Jafari (2012)
10.1080/15685543.2013.819285
Improving the adhesion between carbon fibres and an elastomer matrix using an acrylonitrile containing atmospheric plasma treatment
S. Bai (2013)
10.7567/1347-4065/aaeb35
Functional FAS-13/SiOx composite coatings for improved anticorrosion and hydrophobicity/oleophobicity on AZ91D magnesium alloys
Chi-Liang Ko (2019)
10.1016/J.SURFCOAT.2015.11.004
Atmospheric pressure plasma enhanced chemical vapor deposition of SiOx films for improved corrosion resistant properties of AZ31 magnesium alloys
Yu-Lin Kuo (2015)
10.1088/1742-6596/1492/1/012023
Deposition of SiOx thin films using hexamethyldisiloxane in atmospheric pressure plasma enhanced chemical vapor deposition
T. Krueger (2020)
10.1002/PPAP.201000176
Design of a microplasma device for spatially localised plasma polymerisation
S. Al-Bataineh (2011)
Membrane deposition method, etc.
万谷俊一 (2011)
A process for producing a permeationshemmenden coating of plastic containers and coating system
Gerhard Blasek (2011)
10.4071/ISOM-2016-TP41
Innovative Uses for Plasma Surface Conditioning in the Assembly of Electronic Devices
Khoren Sahagian (2016)
Functional properties and applications of plasma polymerized hexamethyldisiloxane (ppHMDSO) thin films
Francesc Benítez i Porras (2016)
Atmosphärische Plasmabeschichtung von orthopädischen Implantaten
C. Rapp (2017)
10.1007/S13272-018-0324-1
New concepts for cutting, surface treatment and forming of aluminium sheets used for fibre-metal laminate manufacturing
S. Dieckhoff (2019)
10.1016/J.PORGCOAT.2011.07.014
Corrosion protection of metal surfaces by atmospheric pressure plasma jet treatment
C. Regula (2012)
IMPACT OF CONTINUOUS ATMOSPHERIC PRESSURE PLASMA POLYMERISATION OF ACRYLIC ACID ON THE INTERFACIAL PROPTERTIES OF CARBON FIBRE-RFL ELASTOMER COMPOSITES
S. Bai ()
10.1002/PPAP.202000143
Site‐selective atmospheric pressure plasma‐enhanced chemical vapor deposition process for micrometric deposition of plasma‐polymerized methyl methacrylate
Kishor Acharya (2020)
10.1007/978-3-658-18445-2_2
Vorbehandlung von Kunststoffen
R. Wilken (2018)
10.1002/PPAP.201000116
High‐Rate Deposition of Electrochromic Organotungsten Oxide Thin Films for Flexible Electrochromic Devices by Atmospheric Pressure Plasma Jet: The Effect of Substrate Distance
Yung-Sen Lin (2011)
10.1007/S40684-016-0049-8
A review on fabrication processes for electrochromic devices
S. I. Park (2016)
10.1088/1674-1056/21/10/105201
Fabricating a reactive surface on the fibroin film by a room-temperature plasma jet array for biomolecule immobilization
Guangliang Chen (2012)
10.1016/B978-0-323-39040-8.00020-1
20 – Surface Modification of Plastics
K. Johansson (2017)
10.1016/J.SURFCOAT.2019.124928
Nanocomposite coatings based on graphene and siloxane polymers deposited by atmospheric pressure plasma. Application to corrosion protection of steel
A. Anagri (2019)
10.1002/PPAP.201500031
Atmospheric‐Pressure Plasma Polymerization of Acrylic Acid: Gas‐Phase Ion Chemistry
F. Moix (2016)
Příprava texturovaných povrchů na bázi hliníku
Markéta Kadlečková (2017)
10.1002/SIA.6646
Effect of surface modification on the properties of plasma‐polymerized hexamethyldisiloxane thin films
S. Saloum (2019)
10.1016/B978-0-08-096532-1.00408-8
4.07 – Surface Processing Using Cold Atmospheric Pressure Plasmas
D. P. Dowling (2014)
10.1063/1.3565965
Surface reactions as carbon removal mechanism in deposition of silicon dioxide films at atmospheric pressure
R. Reuter (2011)
10.1002/PPAP.201000145
Influence of dc Pulsed Atmospheric Pressure Plasma Jet Processing Conditions on Polymer Activation
D. P. Dowling (2011)
10.3929/ETHZ-A-005990073
Plasma surface modification in the afterglow of micro-barrier discharges
P. Reichen (2009)
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