Online citations, reference lists, and bibliographies.
Referencing for people who value simplicity, privacy, and speed.
Get Citationsy
← Back to Search

Poly(Methylsilane) And Poly(Hydrazinomethylsilane) As Precursors For Silicon-Containing Ceramics

M. Scarlete, Jiliang He, J. Harrod, I. Butler
Published 1995 · Materials Science

Save to my Library
Download PDF
Analyze on Scholarcy Visualize in Litmaps
Reduce the time it takes to create your bibliography by a factor of 10 by using the world’s favourite reference manager
Time to take this seriously.
Get Citationsy
Polymethylsilane (PMS) is an excellent precursor for the preparation of thin films of amorphous SiC on useful substrates, such as silicon wafers, quartz plates and polycrystalline alumina plates. The progress of pyrolysis chemistry can be easily monitored by FTIR on films supported on silicon, down to thicknesses as low as 10- 20 nm. The reactivity of PMS, or of polycarbosilane, with ammonia permits the homogeneous N-doping of these films and they exhibit n-type semiconductivity in the range of 10-30 (Ω.cm)-1. N-doping can also be achieved by using the PMS prepared by Na coupling of MeSiHCl2. This polymer, which contains residual Si-Cl bonds, reacts readily with ammonia to produce SiNH3 +Cl- groups, which lose NH4C1 on pyrolysis to produce silazane linkages in the product preceramic. Poly(hydrazinomethylsilane) is produced by reaction of MeSiHCl2 with N2H4, in the presence of an HCl trap. This polymer may be pyrolysed to give a silicon carbonitride product with an electronic conductivity in the same range as glassy carbon (103 -104 (Ω.cm)-1. Both FTIR and NMR spectrocopies have been used to determine the structure of the polymer and of the series of intermediate materials that are produced by pyrolysis between 100 and 1500°C.
This paper references
Dehydrierende polymerisation von methyldisilanen mittels metallocen-katalyse zu den oligomeren Me3Si[Me2Si]nSiMe2H, HMe2Si [Me2Si]nSiMe2H mit n = 3-9, H[MeSiH]nH mit n = 3-14 und hochpolymetem Poly(methylsilan) (MeSiHx)n
E. Hengge (1992)
Ceramics from organometallic polymers
M. Peuckert (1990)
Amorphous and Crystalline Silicon Carbide III
G. Harris (1992)
Transformation of organometallics into common and exotic materials : design and activation
Exotic Materials (1988)
Pyrolytic Characteristics of Polysilazanes
Y. Blum (1991)
Synthesis of Poly(methylsilylene) by Catalytic Dehydrocoupling with Cp2MMe2 (M = Ti, Zr) Catalysts
Y. Mu (1991)
Poly(methylsilane)—A High Ceramic Yield Precursor to Silicon Carbide
Zhi-Fan Zhang (1991)
Low Temperature Homoepitaxial Growth of 6H-SiC by VPE Method
T. Kimoto (1992)
Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers
M. Scarlete (1994)
Formation of SiC for Microelectronic Applications by C Implantation into Doped a-Si
Bernadette M. Manning (1992)
Special heat-resisting materials from organometallic polymers
S. Yajima (1983)
U. Wannagat (1957)
Synthesis and structure of a highly branched polycarbosilane derived from (chloromethyl)trichlorosilane
Chris K. Whitmarsh (1991)
Some further observations on polymethylsilane as a precursor for silicon carbide
Y. Mu (1994)
Preceramic polymer pyrolysis
Y. Blum (1989)
Dehydrocoupling reactions of organosilanes with hydrazines
J. He (1994)
Spin-Lattice Relaxation in the 6H Polytype of Silicon Carbide
J. Hartman (1994)
Preparation of poly(dichlorosilaethylene) and poly(silaethylene) via ring-opening polymerization
H.-J. Wu (1992)
Aminyl Free Radicals
W. C. Danen (1975)
The Chemistry of Silicon-Nitrogen Compounds
U. Wannagat (1964)
Electrified black holes
E. Harrison (1976)
Organosilicon Polymers as Precursors for Silicon Containing Ceramics: Recent Developments.
D. Seyferth (1987)
Dehydrocoupling of ammonia and silanes catalyzed by dimethyltitanocene
H. Liu (1992)
Absorption coefficient of ߖSiC grown by chemical vapor deposition
A. Solangi (1992)
Development of high tensile strength silicon carbide fibre using an organosilicon polymer precursor
S. Yajima (1978)
Growth and Characterization of β-SiC Films Grown on Si by Gas-Source Molecular Beam Epitaxy
L. Rowland (1992)
Determination of phase composition of silicon nitride powders by silicon-29 magic angle spinning nuclear magnetic resonance spectroscopy
K. R. Carduner (1987)

This paper is referenced by
Semantic Scholar Logo Some data provided by SemanticScholar