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Poly(Methylsilane) And Poly(Hydrazinomethylsilane) As Precursors For Silicon-Containing Ceramics

M. Scarlete, Jiliang He, J. Harrod, I. Butler
Published 1995 · Materials Science

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Polymethylsilane (PMS) is an excellent precursor for the preparation of thin films of amorphous SiC on useful substrates, such as silicon wafers, quartz plates and polycrystalline alumina plates. The progress of pyrolysis chemistry can be easily monitored by FTIR on films supported on silicon, down to thicknesses as low as 10- 20 nm. The reactivity of PMS, or of polycarbosilane, with ammonia permits the homogeneous N-doping of these films and they exhibit n-type semiconductivity in the range of 10-30 (Ω.cm)-1. N-doping can also be achieved by using the PMS prepared by Na coupling of MeSiHCl2. This polymer, which contains residual Si-Cl bonds, reacts readily with ammonia to produce SiNH3 +Cl- groups, which lose NH4C1 on pyrolysis to produce silazane linkages in the product preceramic. Poly(hydrazinomethylsilane) is produced by reaction of MeSiHCl2 with N2H4, in the presence of an HCl trap. This polymer may be pyrolysed to give a silicon carbonitride product with an electronic conductivity in the same range as glassy carbon (103 -104 (Ω.cm)-1. Both FTIR and NMR spectrocopies have been used to determine the structure of the polymer and of the series of intermediate materials that are produced by pyrolysis between 100 and 1500°C.
This paper references
10.1016/0022-328X(92)80127-J
Dehydrierende polymerisation von methyldisilanen mittels metallocen-katalyse zu den oligomeren Me3Si[Me2Si]nSiMe2H, HMe2Si [Me2Si]nSiMe2H mit n = 3-9, H[MeSiH]nH mit n = 3-14 und hochpolymetem Poly(methylsilan) (MeSiHx)n
E. Hengge (1992)
10.1002/ADMA.19900020903
Ceramics from organometallic polymers
M. Peuckert (1990)
10.1007/978-3-642-75048-9
Amorphous and Crystalline Silicon Carbide III
G. Harris (1992)
10.1007/978-94-009-1393-6
Transformation of organometallics into common and exotic materials : design and activation
Exotic Materials (1988)
10.1007/978-94-011-3214-5_12
Pyrolytic Characteristics of Polysilazanes
Y. Blum (1991)
10.1007/978-94-011-3214-5_3
Synthesis of Poly(methylsilylene) by Catalytic Dehydrocoupling with Cp2MMe2 (M = Ti, Zr) Catalysts
Y. Mu (1991)
10.1111/J.1151-2916.1991.TB04080.X
Poly(methylsilane)—A High Ceramic Yield Precursor to Silicon Carbide
Zhi-Fan Zhang (1991)
10.1007/978-3-642-84804-9_4
Low Temperature Homoepitaxial Growth of 6H-SiC by VPE Method
T. Kimoto (1992)
10.1021/CM00043A020
Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers
M. Scarlete (1994)
10.1007/978-3-642-84804-9_37
Formation of SiC for Microelectronic Applications by C Implantation into Doped a-Si
Bernadette M. Manning (1992)
Special heat-resisting materials from organometallic polymers
S. Yajima (1983)
10.1002/ANGE.19570692418
Hydrazin-Silicium-Verbindungen
U. Wannagat (1957)
10.1021/OM00051A025
Synthesis and structure of a highly branched polycarbosilane derived from (chloromethyl)trichlorosilane
Chris K. Whitmarsh (1991)
10.1002/AOC.590080203
Some further observations on polymethylsilane as a precursor for silicon carbide
Y. Mu (1994)
10.1007/BF01105695
Preceramic polymer pyrolysis
Y. Blum (1989)
10.1021/OM00013A049
Dehydrocoupling reactions of organosilanes with hydrazines
J. He (1994)
10.1021/JA00088A041
Spin-Lattice Relaxation in the 6H Polytype of Silicon Carbide
J. Hartman (1994)
10.1021/MA00032A036
Preparation of poly(dichlorosilaethylene) and poly(silaethylene) via ring-opening polymerization
H.-J. Wu (1992)
10.1002/ANIE.197507831
Aminyl Free Radicals
W. C. Danen (1975)
10.1016/S0065-2792(08)60228-9
The Chemistry of Silicon-Nitrogen Compounds
U. Wannagat (1964)
10.1038/264525a0
Electrified black holes
E. Harrison (1976)
10.1007/978-94-009-1393-6_12
Organosilicon Polymers as Precursors for Silicon Containing Ceramics: Recent Developments.
D. Seyferth (1987)
10.1021/OM00038A048
Dehydrocoupling of ammonia and silanes catalyzed by dimethyltitanocene
H. Liu (1992)
10.1557/JMR.1992.0539
Absorption coefficient of ߖSiC grown by chemical vapor deposition
A. Solangi (1992)
10.1038/273525A0
Development of high tensile strength silicon carbide fibre using an organosilicon polymer precursor
S. Yajima (1978)
10.1007/978-3-642-84804-9_10
Growth and Characterization of β-SiC Films Grown on Si by Gas-Source Molecular Beam Epitaxy
L. Rowland (1992)
10.1021/AC00150A015
Determination of phase composition of silicon nitride powders by silicon-29 magic angle spinning nuclear magnetic resonance spectroscopy
K. R. Carduner (1987)



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