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Microwave Microscopy And Its Applications

M. Tabib-Azar
Published 2001 · Materials Science

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Microwave microscopy using evanescent electromagnetic waves in the 1 GHz–100 GHz frequency range is described. Latest spatial resolution figures using resonant and non-resonant evanescent microwave probes with two- and three-dimensional waveguides are discussed. Future trends in this area include design and fabrication of hyperspectral high speed parallel probes capable of scanning large areas with large topography with stand-off compensation, detection of radicals and electron spin transitions, microwave spectroscopy with super-resolution and detection of trace chemicals.
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