Online citations, reference lists, and bibliographies.
← Back to Search

Single Virus Particle Mass Detection Using Microresonators With Nanoscale Thickness

A. Gupta, D. Akin, R. Bashir
Published 2004 · Physics

Cite This
Download PDF
Analyze on Scholarcy
Share
In this letter, we present the microfabrication and application of arrays of silicon cantilever beams as microresonator sensors with nanoscale thickness to detect the mass of individual virus particles. The dimensions of the fabricated cantilever beams were in the range of 4–5 μm in length, 1–2 μm in width and 20–30 nm in thickness. The virus particles we used in the study were vaccinia virus, which is a member of the Poxviridae family and forms the basis of the smallpox vaccine. The frequency spectra of the cantilever beams, due to thermal and ambient noise, were measured using a laser Doppler vibrometer under ambient conditions. The change in resonant frequency as a function of the virus particle mass binding on the cantilever beam surface forms the basis of the detection scheme. We have demonstrated the detection of a single vaccinia virus particle with an average mass of 9.5 fg. These devices can be very useful as components of biosensors for the detection of airborne virus particles.
This paper references



This paper is referenced by
10.1038/nnano.2008.91
Label-free detection of DNA hybridization based on hydration-induced tension in nucleic acid films.
Johann Mertens (2008)
10.1088/0960-1317/20/10/105027
Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method
H. Sadeghian (2010)
Mesure de champs à l'échelle micrométrique pour l'identification d'effets mécaniques surfaciques : vers une nouvelle instrumentation pour la biologie
F. Amiot (2005)
10.22184/1993-8578.2015.58.4.62.67
Detection of viruses using piezoelectric cantilevers
Gleb A. Kiselev (2015)
10.1557/PROC-872-J11.2
Thin Film Silicon Microbridges for DNA Detection
T. Adrega (2005)
10.1063/1.2171650
Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit
S. Kim (2006)
10.1016/J.SNB.2006.04.097
Capture of airborne nanoparticles in swirling flows using non-uniform electrostatic fields for bio-sensor applications
Jaesung Jang (2007)
10.1088/0957-4484/19/03/035503
Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits.
D. Ramos (2008)
10.1109/JMEMS.2009.2017081
A Microresonator Design Based on Nonlinear 1 : 2 Internal Resonance in Flexural Structural Modes
A. Vyas (2009)
10.18297/etd/1520
Improved fabrication and modeling of piezoresistive microcantilever beams for gas detection and sensing.
Ni Wang (2012)
10.1016/j.compscitech.2008.08.007
Extruded Mg based hybrid composite alloys studied by longitudinal impression creep
Alok K. Mondal (2017)
10.1109/MEMSYS.2007.4433026
Intergrated resonant cantilever sensors with 2nd torsion-mode for fg-level resoluble biomedical detection
Dazhong Jin (2007)
10.1380/EJSSNT.2009.161
Effects of Surface Stress on Nanocantilevers
H. Sadeghian (2009)
10.1016/j.sna.2020.112290
Novel resonant MEMS sensor for the detection of particles with dielectric properties in aged lubricating oils
F. Patocka (2020)
10.1364/CLEO_AT.2017.JW2A.14
A high performance optomechanical mass sensor
Y. Zhang (2017)
10.1016/J.MEE.2009.11.075
Columnar shaped microresonators for mass detection and gas analysis
J. Kehrbusch (2010)
10.1038/srep01288
Real-time single airborne nanoparticle detection with nanomechanical resonant filter-fiber
S. Schmid (2013)
10.1063/1.3677997
Rectification of elastic waves in a thin plate
Y. Tanaka (2012)
10.1016/J.SNB.2009.12.048
Impedance change as an alternate measure of resonant frequency shift of piezoelectric-excited millimeter-sized cantilever (PEMC) sensors
R. Lakshmanan (2010)
Vibration Analysis of Piezoelectric Microcantilever Sensors
A. Salehi-Khojin (2008)
10.1039/b713330h
Microcantilever biosensors based on conformational change of proteins.
H. Ji (2008)
10.1109/OMEMS.2008.4607821
Resonant cantilever bio sensor with integrated grating readout
H.I. Ocakli (2008)
10.4172/2469-410X.1000125
Single Layer Graphene Sheet-based Nanoelectromechanical Resonator as Mass Detection
Mina An (2015)
10.1016/J.IJMECSCI.2006.01.003
A multiscale mechanics approach for modeling textured polycrystalline thin films with nanothickness
H. Zhang (2006)
10.1109/JMEMS.2011.2160936
Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic Coating
D. Eroğlu (2011)
10.3390/microarrays4020228
Label and Label-Free Detection Techniques for Protein Microarrays
A. Syahir (2015)
10.3390/s19183968
Assessing the Mass Sensitivity for Different Electrode Materials Commonly Used in Quartz Crystal Microbalances (QCMs)
X. Huang (2019)
10.1088/0960-1317/26/9/095007
Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium
G. Kathel (2016)
10.1016/j.nano.2013.11.009
Magnetic nanoparticle-based immunoassay for rapid detection of influenza infections by using an integrated microfluidic system
Lien-Yu Hung (2014)
10.1039/c3an36771a
Multifunctional electrochemical aptasensor for aptamer clones screening, virus quantitation in blood and viability assessment.
Mahmoud Labib (2013)
10.32657/10356/47725
A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing
M. Olfatnia (2011)
Analysis of 2:1 Internal Resonance in MEMS Applications
N. Noori (2018)
See more
Semantic Scholar Logo Some data provided by SemanticScholar