Online citations, reference lists, and bibliographies.
Please confirm you are human
(Sign Up for free to never see this)
← Back to Search

Micromachined Electrodes For Biopotential Measurements

P. Griss, P. Enoksson, H. Tolvanen-Laakso, Pekka T. Merilainen, S. Ollmar, G. Stemme
Published 2001 · Materials Science

Save to my Library
Download PDF
Analyze on Scholarcy
We describe the microfabrication, packaging and testing of a micromachined dry biopotential electrode, (i.e., where electrolytic gel is not required). It consists of an array of micro-dimensioned, very sharp spikes, (i.e., needles) designed for penetration of human skin which circumvent high impedance problems associated with layers of the outer skin. The spikes are etched in silicon by deep reactive ion etching and are subsequently covered with a silver-silverchloride (Ag-AgCl) double layer. The electrode-skin-electrode impedance of dry spiked electrodes having a size of 4/spl times/4 mm/sup 2/ is reduced compared to standard electrodes using electrolytic gel and having a comparable size. Recorded low amplitude biopotentials resulting from the activity of the brain, (i.e., EEG signals) are of high quality, even for spiked electrodes as small as 2/spl times/2 mm/sup 2/. The spiked electrode offers a promising alternative to standard electrodes in biomedical applications and is of interest in research of new biomedical methods.
This paper references

This paper is referenced by
Pneumatic Sleeve-Assisted Stable sEMG Measurement for Microneedle Array Electrode
M. Kim (2018)
The Cognition and Neuroergonomics (CaN) Collaborative Technology Alliance (CTA): Scientific Vision, Approach, and Translational Paths
Kelvin S. Oie (2012)
Novel, side opened out-of-plane microneedles for microfluidic transdermal interfacing
P. Griss (2002)
Penetration-Enhanced Ultrasharp Microneedles and Prediction on Skin Interaction for Efficient Transdermal Drug Delivery
N. Roxhed (2007)
Power-efficient wireless sensor for physiological signal acquisition
Chia-Lin Chang (2009)
ower-efficient wireless sensor for physiological ignal acquisition
hia-Lin Chang (2009)
Characterization and Fabrication of Novel Micromachined Electrode for BSN-Based Vital Signs Monitoring System
D. G. Guo (2009)
Enhancing the Usability of Brain-Computer Interface Systems
H. Baek (2019)
Characterization of micromachined spiked biopotential electrodes
P. Griss (2002)
2001 Index Journal of Microelectromechanical Systems Vol. 10
B. Xu (2001)
Fabrication of Parylene-Coated Microneedle Array Electrode for Wearable ECG Device
Afraiz Tariq Satti (2020)
Study of the Characteristics of Scalp Electroencephalography Sensing
Geoffrey Long (2013)
Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement
Li-Sheng Hsu (2014)
Development of the three dimensional multi-electrode array for neural recording
Huai-Yuan Chu (2005)
Methods of Melanoma Detection.
S. Leachman (2016)
Long-term electroencephalogram measurement using polymer-based dry microneedle electrode
M. Arai (2015)
A WirelessPatch-type PhysiologicalMonitoring MicroSystem
Ting-Chen Ke (2006)
Microinjection Into Skin Using Microneedles
W. Martanto (2005)
Poly(3,4-ethylenedioxythiophene) (PEDOT) as interface material for improving electrochemical performance of microneedles array-based dry electrode
Yuanfang Chen (2013)
A dry electrophysiology electrode using CNT arrays
G. Ruffini (2005)
Super-short solid silicon microneedles for transdermal drug delivery applications
Li Weize (2010)
Two-Wired Active Spring-Loaded Dry Electrodes for EEG Measurements
Seungchan Lee (2019)
Dry EEG Electrodes
M. A. Lopez-Gordo (2014)
Mechanical properties of surface microstructures of metal dry bioelectrode
W. Zhou (2018)
A Novel, Needle-Array Dry-Electrode With Stainless Steel Micro-Tips, for Electroencephalography Monitoring
J. K. Radhakrishnan (2018)
A Switching Capacitor CMOS Based Device for Hands-Free Electrolarynx Activation Using Electromyographic Signals
Z. Pineda-Rico (2008)
Magnetic field assisted laser fabrication and electrical characterizations of metal dry Biolectrode with surface microstructures
W. Zhou (2019)
Flexible polymer-based micro needle array sEMG sensor
M. Kim (2013)
Novel EEG electrode set for emergency use
Pasi Lepola (2014)
Electrical impedance performance of metal dry bioelectrode with different surface coatings
W. Liu (2018)
Characterization of impedance properties of metal dry bioelectrodes with surface microstructure arrays
W. Zhou (2017)
Advanced Wearable Sensors and Systems Enabling Personal Applications
A. Lymberis (2010)
See more
Semantic Scholar Logo Some data provided by SemanticScholar