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Development Of A Three-Dimensional Noncontact Digital Optical Profiler

J. C. Wyant, C. L. Koliopoulos, B. Bhushan, D. Basila
Published 1986 · Engineering

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A noncontact three-dimensional optical profiler for measuring surface roughness is described. The system consists of a reflection microscope, Mirau interferometer with a reference surface mounted on a piezoelectric transducer, CID detector array, frame grabber, and micro-computer. Interferometric phase-shifting techniques are used to obtain surface height information. The height measurements areprocessed by a computer to obtain topographical statistical parameters, which are useful in predicting tribological and magnetic performances of the head-media interface in magnetic storage systems. Sample data are presented for magnetic media (tape, floppy disk, and rigid disk), a magnetic head, a silicon wafer, and a glass slide.
This paper references



This paper is referenced by
10.1364/AO.35.006663
Scanning optical microellipsometer for pure surface profiling.
C. See (1996)
10.1088/2051-672X/4/1/013002
Topography measurements and applications in ballistics and tool mark identifications*
T. Vorburger (2016)
10.1117/12.949150
On A Few Functions Of HIPOSS (High Precision Optical Surface Sensor) And Their Applications
T. Kohno (1989)
10.1016/0043-1648(95)06697-7
Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
C. Y. Poon (1995)
10.1002/ADMA.19910030107
Optical and surface‐analytical methods for the characterization of ultrathin organic films
C. Bubeck (1991)
10.1063/1.2336207
Absolute measurement of the reference surface profile of a phase shifting interferometer
J. Lim (2006)
10.1016/0022-0248(92)90670-E
Phase shifting interferometry of growth patterns on the octahedral faces of natural diamonds
W.J.P. van Enckevort (1992)
10.1364/OL.18.001899
Two-color light-emitting-diode source for high-precision phase-shifting interferometry.
L. Deck (1993)
10.1364/AO.36.003948
Noise and information in interferometric cross correlators.
K. Hill (1997)
10.1002/9783527699230.CH9
Testing Texture and Imperfections of Optical Surfaces
Herbert Groß (2015)
10.1063/1.1687045
Development of a combined interference microscope objective and scanning probe microscope
James W. G. Tyrrell (2004)
10.25560/6811
Film Forming and Friction Properties of Sulphur-Free Antiwear Additives Zinc Dialkylphosphates (ZDPs)
Koji Hoshino (2011)
10.1016/B978-012408750-7/50012-4
CHAPTER 4 – Phase Imaging
T. Corle (1996)
10.17077/etd.j4b41sbi
Computational and experimental biomechanics of total hip wear increase due to femoral head damage
K. Kruger (2014)
10.1115/1.2833895
Application of Boltzmann Statistical Mechanics in the Validation of the Gaussian Summit-Height Distribution in Rough Surfaces
M. Leung (1997)
10.1201/B18328-35
Interference Microscopy for Surface Structure Analysis
Joydip De (2017)
10.1364/AO.29.003823
Absolute measurement of surface roughness.
K. Creath (1990)
10.1364/OE.17.001442
High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity.
Chu-Shik Kang (2009)
10.1016/S0079-6638(08)70291-9
IV Advanced Evaluation Techniques in Interferometry
J. Schwider (1990)
10.1016/S0065-2717(03)37003-0
OPTICAL AND THERMAL RADIATIVE PROPERTIES OF SEMICONDUCTORS RELATED TO MICRO/NANOTECHNOLOGY
Z. Zhang (2003)
10.1016/S0263-2241(03)00049-6
Self-calibration of lateral non-linearities of an interference microscope
W. Gao (2003)
10.1117/12.545693
Combined interference and scanning force microscope
H. U. Danzebrink (2004)
10.1088/0957-0233/2/9/001
Texture analysis of rough surfaces using optical Fourier transform
V. Huynh (1991)
10.1117/12.827823
Surface profile analysis using a fiber optic low-coherence interferometer
R. Schmitt (2009)
10.1088/2051-672X/2/1/014001
Roughness and function
T. Thomas (2013)
10.1201/9780849377877-10
Surface Roughness Analysis and Measurement Techniques
B. Bhushan (2000)
Modeling and Measurements of the Bidirectional Reflectance of Microrough Silicon Surfaces
Q. Zhu (2004)
10.1016/J.MICRON.2006.07.005
Resolving surface details with reflection and fluorescence video-confocal profilometry.
P. Benedetti (2007)
10.1016/0141-6359(94)90124-4
Optical profilometry and its application to mechanically inaccessible surfaces Part I: Principles of focus error detection
M. Visscher (1994)
10.1117/12.949161
Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry
Rainer Brodmann (1989)
10.1109/20.50517
On the interpretation of tape friction
A. B. Groenou (1990)
10.1115/1.2830064
Prediction of Thermal Contact Conductance in Vacuum by Statistical Mechanics
M. Leung (1998)
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